Table of Contents

1. Introduction.- 1.1 Modeling and Simulation of Microtransducers.- 1.2 Illustrative Example.- 1.3 Progress in Microtransducer Modeling.- 1.4 References.- 2 Basic Electronic Transport.- 2.1 Poisson’s Equation.- 2.2 Continuity Equations.- 2.3 Carrier Transport in Crystalline Materials and Isothermal Behavior.- 2.4 Electrical Conductivity and Isothermal Behavior in Polycrystalline Materials.- 2.5 Electrical Conductivity and Isothermal Behavior in Metals.- 2.6 Boundary and Interface Conditions.- 2.7 The External Fields — What Do They Influence?.- 2.8 References.- 3 Radiation Effects on Carrier Transport.- 3.1 Reflection and Transmission of Optical Signals.- 3.2 Modeling Optical Absorption in Intrinsic Semiconductors.- 3.3 Absorption in Heavily-Doped Semiconductors.- 3.4 Optical Generation Rate and Quantum Efficiency.- 3.5 Low Energy Interactions with Insulators and Metals.- 3.6 High Energy Interactions and Monte Carlo Simulations.- 3.7 Model Equations for Radiant Sensor Simulation.- 3.8 Illustrative Simulation Example — Color Sensor.- 3.9 References.- 4 Magnetic Field Effects on Carrier Transport.- 4.1 Galvanomagnetic Transport Equation.- 4.2 Galvanomagnetic Transport Coefficients.- 4.3 Equations and Boundary Conditions for Magnetic Sensor Simulation.- 4.4 Illustrative Simulation Example — Micromachined Magnetic Vector Probe.- 4.5 References.- 5 Thermal Non-Uniformity Effects on Carrier Transport.- 5.1 Non-Isothermal Effects.- 5.2 Electrothermal Transport Model.- 5.3 Electrical and Thermal Transport Coefficients.- 5.4 Electro-Thermo-Magnetic Interactions.- 5.5 Heat Transfer in Thermal Microstructures.- 5.6 Summary of Equations and Computational Procedure.- 5.7 Illustrative Simulation Example — Micro Pirani Gauge.- 5.8 References.- 6 Mechanical Effects on CarrierTransport.- 6.1 Piezoresistive Effect.- 6.2 Strain and Electron Transport.- 6.3 Strain and Hole Transport.- 6.4 Piezojunction Effect.- 6.5 Effects of Stress Gradients.- 6.6 Galvano-Piezo-Magnetic Effects.- 6.7 The Piezo Drift-Diffusion Transport Model.- 6.8 Illustrative Simulation Example — Stress Effects on Hall Sensors.- 6.9 References.- 7 Mechanical and Fluidic Signals.- 7.1 Definitions.- 7.2 Model Equations for Mechanical Analysis.- 7.3 Model Equations for Analysis of Fluid Transport.- 7.4 Illustrative Simulation Example — Analysis of Flow Channels.- 7.5 References.- 8 Micro-Actuation.- 8.1 Transduction Principles.- 8.2 State-of-the-Art and Preview.- 8.3 Electrostatic Actuation.- 8.4 Thermal Actuation.- 8.5 Magnetic Actuation.- 8.6 Piezoelectric Actuation.- 8.7 Electroacoustic Transducers.- 8.8 Computational Procedure and Coupling.- 8.9 Illustrative Example — CMOS Micromirror.- 8.10 References.- 9 Microsystem Simulation.- 9.1 Electrical Analogues for Mixed-Signals and Historical Developments.- 9.2 Circuit Modeling and Implementation Considerations.- 9.3 Lumped Analysis: Illustrative Example — Electrostatic Micromirror.- 9.4 Distributed Analysis: Illustrative Example — Flow Microsensor.- 9.5 References.