Nanofabrication by Ion-Beam Sputtering: Fundamentals and Applications / Edition 1

by Tapobrata Som (Editor), Dinakar Kanjilal (Editor)

Overview

Considerable attention has been paid to ion beam sputtering as an effective way to fabricate self-organized nano-patterns on various substrates. The significance of this method for patterning surfaces is that the technique is fast, simple, and less expensive. The possibility to create patterns on very large areas at once makes it even more attractive. This book reviews various fascinating results, understand the underlying physics of ion induced pattern formation, to highlight the potential applications of the patterned surfaces, and to explore the patterning behavior by different irradiation parameters in order to create desired surface morphologies on specific materials.

Product Details

ISBN-13:	9789814303750
Publisher:	Jenny Stanford Publishing
Publication date:	11/27/2012
Pages:	372
Product dimensions:	6.20(w) x 9.10(h) x 1.00(d)

About the Author

Tapobrata Som, Dinakar Kanjilal

Table of Contents

Elements of Sputtering Theory. Sputter-Ripple Formation on Flat and Rough Surfaces – A Case Study with Si. Low Energy Ion Induced Pattern Formation in Si-Ge Alloy. Patterning of Ionic Insulator Surfaces with Low Energy Ion Beams. Nanostructures of Thin Films by keV Ion Beams. Surface Nanopatterns on Si(100) by Normal-Incidence Ion Sputtering with Metal Incorporation. Kinetic Monte Carlo Simulations of Low Energy Ion-Induced Surface Patterning. From Cascades to Patterns: A Monte Carlo Approach. Understanding Surface Patterning by Lattice Gas Models. Applications of Ion Induced Patterned Substrates in Plasmonics.

What People are Saying About This

From the Publisher

"This volume provides a remarkable overview of the status of the evolving field of ion-beam sputtering and its promising applications as a process tool for tailoring self-organized patterned properties and periodic nanoscale topographic features of surfaces. The topical scope includes the fundamental physics of sputtering, advanced simulations of pattern formation, and selected experimental applications. The list of authors includes distinguished authorities in this field, and the book will surely become a highly cited reference source, as future manufacturing technologies develop."
—Dr. J. E. E. Baglin - IBM Almaden Research Center, USA

"Since the inception of nanotechnology in the 1970s, low-energy ion-beam sputtering of solids has been expected to rank among the top routes to nanostructures fabrication. In spite of the development that this technique has since undergone, to date a thorough revision is under way on the basic mechanisms controlling the pattern formation process, key to a full control of its practical implications. This book provides a broad and timely view of the topic through contributions by world-class specialists, from atomistic principles and discrete theoretical modeling to experiments and technological applications. It will be invaluable for both practitioners in the field and anyone interested in nanoscience, to assess the degree to which current developments enable the harnessing of the technique that is up to the well-founded expectations."
—Prof. Rodolfo Cuerno - Universidad Carlos III de Madrid, Spain

"Bombarding a solid surface with a broad ion beam can produce a remarkable variety of self-assembled nanoscale patterns, including periodic height modulations or "ripples" and mounds arranged in hexagonal arrays of astonishing regularity. This book gives a comprehensive overview of our current understanding of these intriguing phenomena. Written by leaders in the field, it covers both theoretical and experimental work, and the topics range from the fundamental to the applied. This volume will be an invaluable reference for both researchers in the field and those who are new to the topic."
—Prof. R. Mark Bradley - Colorado State University, USA

Editorial Reviews

"This volume provides a remarkable overview of the status of the evolving field of ion-beam sputtering and its promising applications as a process tool for tailoring self-organized patterned properties and periodic nanoscale topographic features of surfaces. The topical scope includes the fundamental physics of sputtering, advanced simulations of pattern formation, and selected experimental applications. The list of authors includes distinguished authorities in this field, and the book will surely become a highly cited reference source, as future manufacturing technologies develop."
—Dr. J. E. E. Baglin - IBM Almaden Research Center, USA

"Since the inception of nanotechnology in the 1970s, low-energy ion-beam sputtering of solids has been expected to rank among the top routes to nanostructures fabrication. In spite of the development that this technique has since undergone, to date a thorough revision is under way on the basic mechanisms controlling the pattern formation process, key to a full control of its practical implications. This book provides a broad and timely view of the topic through contributions by world-class specialists, from atomistic principles and discrete theoretical modeling to experiments and technological applications. It will be invaluable for both practitioners in the field and anyone interested in nanoscience, to assess the degree to which current developments enable the harnessing of the technique that is up to the well-founded expectations."
—Prof. Rodolfo Cuerno - Universidad Carlos III de Madrid, Spain

"Bombarding a solid surface with a broad ion beam can produce a remarkable variety of self-assembled nanoscale patterns, including periodic height modulations or "ripples" and mounds arranged in hexagonal arrays of astonishing regularity. This book gives a comprehensive overview of our current understanding of these intriguing phenomena. Written by leaders in the field, it covers both theoretical and experimental work, and the topics range from the fundamental to the applied. This volume will be an invaluable reference for both researchers in the field and those who are new to the topic."
—Prof. R. Mark Bradley - Colorado State University, USA

From the Publisher