Advances and Challenges in Chemical Mechanical Planarization: Volume 991

Advances and Challenges in Chemical Mechanical Planarization: Volume 991

by Gerfried Zwicker
     
 

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.See more details below

Overview

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Product Details

ISBN-13:
9781558999510
Publisher:
Cambridge University Press
Publication date:
01/01/2009
Series:
MRS Proceedings Series
Pages:
371
Product dimensions:
6.20(w) x 9.20(h) x 1.00(d)

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