An Introduction to Surface-Micromachining

by Robert W. Johnstone, Ash Parmaswaran

Overview

An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function.

This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.

Product Details

ISBN-13:	9781402080203
Publisher:	Springer US
Publication date:	06/03/2004
Series:	Information Technology: Transmission, Processing & Storage
Edition description:	2004
Pages:	189
Product dimensions:	6.10(w) x 9.25(h) x 0.02(d)

Table of Contents

1. Introduction.- 1.1 Why miniaturize?.- 1.2 Why surface-micromachining?.- 1.3 History.- References.- I Fabrication.- 2. Microfabrication Processes.- 3. Micromachining Technologies.- II Design.- 4. Microscale Physics.- 5. Mechanics.- 6. Design Rules.- 7. Non-Ideal Processes.- 8. Design Techniques.- III Devices.- 9. Electrical Components.- 10. Mechanical Components.- 11. Electrostatic Actuators.- 12. Electro-Thermal-Compliant Actuators.- 13. Raised Structures.- IV Processes.- 14. PolyMUMPsTM Process.- 15. SUMMiTTM Process.- 16. MUSiC® Process.