The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
BooknewsProceedings of a symposium held in Boston, Nov.-Dec. 1988. Areas covered include: clusters; compound semiconductors and deposition chemistry; silicon surface chemistry; chemical vapor deposition; aluminum deposition; laser-induced and ion beam chemistry; and microelectronics processing and technology. Acidic paper. Annotation c. Book News, Inc., Portland, OR (booknews.com)
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