Chemical Perspectives of Microelectronic Materials I, Volume 131 by Mihal E. Gross, Hardcover | Barnes & Noble
Chemical Perspectives of Microelectronic Materials I, Volume 131

Chemical Perspectives of Microelectronic Materials I, Volume 131

by Mihal E. Gross
     
 

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Overview

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Editorial Reviews

Booknews
Proceedings of a symposium held in Boston, Nov.-Dec. 1988. Areas covered include: clusters; compound semiconductors and deposition chemistry; silicon surface chemistry; chemical vapor deposition; aluminum deposition; laser-induced and ion beam chemistry; and microelectronics processing and technology. Acidic paper. Annotation c. Book News, Inc., Portland, OR (booknews.com)

Product Details

ISBN-13:
9781558990043
Publisher:
Cambridge University Press
Publication date:
04/24/1989
Series:
MRS Proceedings Series, #13
Pages:
642
Product dimensions:
6.40(w) x 9.30(h) x 1.80(d)

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