Chemical Vapor Deposition Polymerization: The Growth and Properties of Parylene Thin Films / Edition 1

Chemical Vapor Deposition Polymerization: The Growth and Properties of Parylene Thin Films / Edition 1

by Jeffrey B. Fortin, Toh-Ming Lu
     
 

ISBN-10: 1402076886

ISBN-13: 9781402076886

Pub. Date: 11/30/2003

Publisher: Springer US

The interest and research in the parylene family polymers has remained strong since their invention in 1947. To date there have been a handful of reviews and encyclopedia articles covering parylene and its properties, but no textbook has been devoted to the subject. The authors are attempting to fill the void with this textbook. It provides a solid introduction to

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Overview

The interest and research in the parylene family polymers has remained strong since their invention in 1947. To date there have been a handful of reviews and encyclopedia articles covering parylene and its properties, but no textbook has been devoted to the subject. The authors are attempting to fill the void with this textbook. It provides a solid introduction to the parylene family polymers, their deposition apparatus and their film properties. Chemical Vapor Deposition Polymerization - The Growth and Properties of Parylene Thin Films is intended to be valuable to both users and researchers of parylene thin films. It should be particularly useful for those setting up and characterizing their first research deposition system. It provides a good picture of the deposition process and equipment, as well as information on system-to-system variations that is important to consider when designing a deposition system or making modifications to an existing one. Also included are methods to characterizae a deposition system's pumping properties as well as monitor the deposition process via mass spectrometry. There are many references that will lead the reader to further information on the topic being discussed. This text should serve as a useful reference source and handbook for scientists and engineers interested in depositing high quality parylene thin films.

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Product Details

ISBN-13:
9781402076886
Publisher:
Springer US
Publication date:
11/30/2003
Edition description:
2004
Pages:
102
Product dimensions:
6.10(w) x 9.25(h) x 0.01(d)

Table of Contents

List of Figures
List of Tables
Preface
Acknowledgments
1Introduction1
2Deposition Equipment9
3Step-by-Step Guide to Depositing Perylene23
4Perylene-N Precursor Chemistry27
5Deposition Kinetics for Polymerization via the Gorham Route41
6Film Properties57
7Other CVD Polymers83

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