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Chemical Vapor Deposition Polymerization: The Growth and Properties of Parylene Thin Films / Edition 1

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Overview

Chemical Vapor Deposition Polymerization - The Growth and Properties of Parylene Thin Films is intended to be valuable to both users and researchers of parylene thin films. It should be particularly useful for those setting up and characterizing their first research deposition system. It provides a good picture of the deposition process and equipment, as well as information on system-to-system variations that is important to consider when designing a deposition system or making modifications to an existing one. Also included are methods to characterizae a deposition system's pumping properties as well as monitor the deposition process via mass spectrometry. There are many references that will lead the reader to further information on the topic being discussed.
This text should serve as a useful reference source and handbook for scientists and engineers interested in depositing high quality parylene thin films.

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Product Details

  • ISBN-13: 9781402076886
  • Publisher: Springer US
  • Publication date: 11/30/2003
  • Edition description: 2004
  • Edition number: 1
  • Pages: 102
  • Product dimensions: 9.21 (w) x 6.14 (h) x 0.31 (d)

Table of Contents

List of Figures
List of Tables
Preface
Acknowledgments
1 Introduction 1
2 Deposition Equipment 9
3 Step-by-Step Guide to Depositing Perylene 23
4 Perylene-N Precursor Chemistry 27
5 Deposition Kinetics for Polymerization via the Gorham Route 41
6 Film Properties 57
7 Other CVD Polymers 83
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