This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.
This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.

Chemistry of Atomic Layer Deposition
113
Chemistry of Atomic Layer Deposition
113Related collections and offers
Product Details
ISBN-13: | 9783110712599 |
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Publisher: | De Gruyter |
Publication date: | 11/08/2021 |
Series: | De Gruyter Textbook |
Sold by: | Barnes & Noble |
Format: | eBook |
Pages: | 113 |
File size: | 4 MB |
Age Range: | 18 Years |