Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set / Edition 3

Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set / Edition 3

by Marc J. Madou, Anthony Ghiotto
     
 

Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical

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Overview

Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options.

The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.

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Product Details

ISBN-13:
9780849331800
Publisher:
Taylor & Francis
Publication date:
08/03/2011
Edition description:
New Edition
Pages:
1992
Product dimensions:
9.10(w) x 11.40(h) x 3.30(d)

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Table of Contents

Volume I
Introduction
Historical Note: The Ascent of Silicon, MEMS, and NEMS
Crystallography
Quantum Mechanics and the Band Theory of Solids
Silicon Single Crystal Is Still King
Photonics
Fluidics
Electrochemical and Optical Analytical Techniques
Index

Volume II
Part I: Lithography
Introduction to Part I
Photolithography
Next-Generation Lithographies and Lithography Research

Part II: Pattern Transfer with Subtractive Techniques
Introduction to Part II
Dry Etching
Wet Chemical Etching and Wet Bulk MicromachiningPools as Tools
Thermal Energy-Based Removing
MechanicalEnergy-Based Removing

Part III: Pattern Transfer with Additive Techniques
Introduction to Part III
Physical and Chemical Vapor DepositionThin Film Properties and Surface Micromachining
Chemical, Photochemical, and Electrochemical Forming Techniques
Thermal Energy-Based Forming TechniquesThermoforming
10 Micromolding TechniquesLIGA
Index

Volume III
Part I: From Traditional Manufacturing to Nanotechnology
Introduction to Part I
Nonlithography-Based (Traditional) and Lithography-Based (Nontraditional) Manufacturing Compared
Nature as an Engineering Guide: Biomimetics
Nanotechnology: Top-Down and Bottom-Up Manufacturing Approaches Compared
Packaging, Assembly, and Self-Assembly
Selected Materials and Processes for MEMS and NEMS
6 Metrology and MEMS/NEMS Modeling 285

Part II: Scaling Laws, Actuators, and Power and Brains in Miniature Devices
Introduction to Part II
Scaling Laws
Actuators
Power and Brains in Miniature Devices

Part III: Miniaturization Application
Introduction to Part III
MEMS and NEMS Applications
Index

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