Handbook of Chemical Vapor Deposition, 2nd Edition: Principles, Technology and Applications / Edition 2

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Overview

Turn to this new second edition for an understanding of the latest advances in the chemical vapor deposition (CVD) process. CVD technology has recently grown at a rapid rate, and the number and scope of its applications and their impact on the market have increased considerably. The market is now estimated to be at least double that of a mere seven years ago when the first edition of this book was published. The second edition is an update with a considerably expanded and revised scope. Plasma CVD and metallo-organic CVD are two major factors in this rapid growth. Readers will find the latest data on both processes in this volume. Likewise, the book explains the growing importance of CVD in production of semiconductor and related applications.

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Editorial Reviews

From the Publisher
".presents an objective and systematic assessment." - High Tech Ceramics News
Booknews
Reviews the chemical vapor deposition (CVD) process and its many applications for coatings, powders, fibers, and monolithic components. Individual chapters discuss the CVD of metals, allotropes of carbon, non-metallic elements, and ceramic materials. The second edition updates coverage of plasma CVD, metallo-organic CVD, and the role of CVD in semiconductor production. Annotation c. Book News, Inc., Portland, OR (booknews.com)
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Product Details

  • ISBN-13: 9780815514329
  • Publisher: Elsevier Science
  • Publication date: 1/1/2000
  • Series: Materials Science and Process Technology Series
  • Edition description: Subsequent
  • Edition number: 2
  • Pages: 508
  • Product dimensions: 1.25 (w) x 9.00 (h) x 6.00 (d)

Meet the Author

Hugh Pierson is a private consultant in Chemical Vapor Deposition. He was the head of the Deposition

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Table of Contents

Introduction and General Considerations
Fundamentals of Chemical Vapor Deposition
The Chemistry of CVD
Metallo-Organic CVD (MOCVD)
CVD Processes and Equipment
The CVD of Metals
The CVD of the Allotropes of Carbon
The CVD of Non-Metallic Elements
The CVD of Ceramic Materials: Carbides
The CVD of Ceramic Materials: Nitrides
The CVD of Ceramic Materials: Oxides
The CVD of Ceramic Materials: Borides, Silicides, III-V Compounds and II-VI Compounds (Chalcogenides)
CVD in Electronic Applications: Semiconductors
CVD in Electronic Applications: Conductors, Insulators, and Diffusion Barriers
CVD in Optoelectronic and Ferroelectric Applications
CVD in Optical Applications
CVD in Wear- and Corrosion-Resistant Applications
CVD in Cutting-Tool Applications
CVD in Fiber, Powder, and Monolithic Applications
Conversion Guide
Appendix: Alternative Processes for Thin-Film Deposition and Surface Modification
Index

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