Handbook of Semiconductor Silicon Technology

by William C. O'Mara, Robert B. Herring, Lee P. Hunt

Overview

This handbook is a comprehensive summary of the science, technology and manufacturing of semiconductor silicon materials. Every known property of silicon is detailed. A complete set of binary phase diagrams is included. Practical aspects such as materials handling, safety, impurity and defect reduction are also discussed in depth.

Fundamentals in the areas of silicon precursor compounds, polysilicon, silicon crystal growth, wafer fabrication, epitaxial and CVD deposition are addressed by experts in these fields. Materials properties covered include electrical, optical and mechanical properties, deep level impurities and carrier lifetime, and thermochemistry, as well as specific sections on oxygen, carbon, and nitrogen impurities. The book contains an extensive set of references, tables of materials constants, and silicon properties, and a presentation on the state of the art of materials manufacturing.

Product Details

ISBN-13:	9780815512370
Publisher:	Elsevier Science
Publication date:	12/31/1990
Series:	Materials Science and Process Technology Series
Pages:	816
Sales rank:	989,096
Product dimensions:	6.40(w) x 9.10(h) x 1.80(d)

Table of Contents

Silicon Precursors: Their Manufacture and Properties
Polysilicon Preparation
Crystal Growth of Silicon
Silicon Wafer Preparation
Silicon Epitaxy
Silicon Material Properties
Oxygen, Carbon and Nitrogen in Silicon
Carrier Lifetimes in Silicon
Preparation and Properties of Polycrystalline-Silicon Films
Silicon Phase Diagrams
References
Index

What People are Saying About This

From the Publisher

A comprehensive summary of the science, technology and manufacturing of semiconductor silicon materials by ten experts in the field.

Editorial Reviews

"...comprehensive, up-to-date book..." —SAMPE Journal

From the Publisher

Up-to-date summary of the science, technology and manufacturing of semiconductor silicon materials. Every known property of silicon is detailed. A complete set of silicon binary phase diagrams is included. Practical aspects such as materials handling, safety, impurity and defect reduction are also discussed in depth. Annotation c. Book News, Inc., Portland, OR (booknews.com)

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