Introduction to Microfabrication / Edition 2

Introduction to Microfabrication / Edition 2

by Sami Franssila
     
 

This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer probe tips to meter scale solar cells, and a host of microelectronic,

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Overview

This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer probe tips to meter scale solar cells, and a host of microelectronic, mechanical, optical and fluidic devices in between. Latest developments in wafer engineering, patterning, thin films, surface preparation and bonding are covered.

This second edition includes:

  • expanded sections on MEMS and microfluidics related fabrication issues
  • new chapters on polymer and glass microprocessing, as well as serial processing techniques
  • 200 completely new and 200 modified figures
  • more coverage of imprinting techniques, process integration and economics of microfabrication
  • 300 homework exercises including conceptual thinking assignments, order of magnitude estimates, standard calculations, and device design and process analysis problems
  • solutions to homework problems on the complementary website, as well as PDF slides of the figures and tables within the book

With clear sections separating basic principles from more advanced material, this is a valuable textbook for senior undergraduate and beginning graduate students wanting to understand the fundamentals of microfabrication. The book also serves as a handy desk reference for practicing electrical engineers, materials scientists, chemists and physicists alike.

www.wiley.com/go/Franssila_Micro2e

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Product Details

ISBN-13:
9780470749838
Publisher:
Wiley
Publication date:
11/16/2010
Edition description:
New Edition
Pages:
534
Product dimensions:
7.70(w) x 10.00(h) x 1.30(d)

Table of Contents

Pt. IIntroduction1
1Introduction3
2Micrometrology and materials characterization17
3Simulation of microfabrication processes27
Pt. IIMaterials33
4Silicon35
5Thin film materials and processes47
6Epitaxy65
7Thin-film growth and structure73
Pt. IIIBasic Processes91
8Pattern generation93
9Optical lithography99
10Lithographic patterns107
11Etching119
12Wafer cleaning and surface preparation133
13Thermal oxidation143
14Diffusion153
15Ion implantation159
16CMP : Chemical-mechanical polishing165
17Bonding and layer transfer173
18Molding and stamping183
Pt. IVStructures191
19Self-aligned structures193
20Plasma etched structures199
21Wet-etched silicon structures205
22Sacrificial and released structures217
23Structures by deposition227
Pt. VIntegration235
24Process integration237
25CMOS transistor fabrication255
26Bipolar technology269
27Multilevel metallization277
28MEMS process integration287
29Processing on non-silicon substrates301
Pt. VITools307
30Tools for microfabrication309
31Tools for hot processes315
32Vacuum and plasmas321
33Tools for CVD and epitaxy329
34Integrated processing337
Pt. VIIManufacturing341
35Cleanrooms343
36Yield349
37Wafer fab355
Pt. VIIIFuture361
38Moore's law363
39Microfabrication at large373

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