Introduction to Microfabricationby Sami Franssila
This book will provide coverage of all aspects of the attempt to build functional devices at a molecular size. Emphasis is placed upon general principles and technologies. Franssila provides coverage of specific devices, beginning with simple solar cells and nanowires and building up to more complex examples such as power devices, MEMS, thin film transistors, CMOS and bipolar transistors, to illustrate his points. Materials, processes and the economics of microfabrication are discussed and simulation examples and measurement characteristics provided.
* The author has based his material on his own successful courses in the field.
* Includes end of chapter examples and exercises to test readers understanding of the key concepts.
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- Product dimensions:
- 7.72(w) x 10.04(h) x 1.15(d)
Meet the Author
Professor Sami Franssila, Helsinki University of Technology, Finland
Sami Franssila has taught courses on microfluidics, bioMEMs, microsystems, nanoscience, silicon microtechnology and thin-film technology at Helsinki University of Technology since 1998. He is group leader of the Microfabrication group at Micronova, the Centre for Micro and Nanotechnology which is run jointly by the VTT Technical Research Centre of Finland and Helsinki University of Technology.
Professor Franssila researches into micro- and nanofabrication for fluidic, chemical and biological devices, chemical microsystems and thin film technology.
He has authored or co-authored over 60 peer reviewed articles, 120 international conference papers and written one textbook Introduction to Microfabrication, published by John Wiley & Sons in 2004.
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