Introduction to Semiconductor Manufacturing Technology / Edition 1

Introduction to Semiconductor Manufacturing Technology / Edition 1

by Hong Xiao
     
 

This book is written for technology students taking their first course in semiconductor manufacturing. It contains comprehensive and up-to-date information on this fast-changing industry. The text provides excellent descriptions of semiconductors, advanced manufacturing technologies, and plasma in integrated circuit (IC) processes. It focuses on the newest IC… See more details below

Overview

This book is written for technology students taking their first course in semiconductor manufacturing. It contains comprehensive and up-to-date information on this fast-changing industry. The text provides excellent descriptions of semiconductors, advanced manufacturing technologies, and plasma in integrated circuit (IC) processes. It focuses on the newest IC fabrication technologies and also describes older technologies to help the reader understand the development from an historical perspective. The material covered in the text is very close to real fabrication situations.

Product Details

ISBN-13:
9780130224040
Publisher:
Prentice Hall
Publication date:
12/04/2000
Pages:
647
Product dimensions:
7.52(w) x 9.25(h) x 0.55(d)

Table of Contents

1: Introduction
2: Introduction of IC Fabrication
3: Semiconductor Basics
4: Wafer Manufacturing
5: Thermal Processes
6: Photolithography
7: Plasma Basics
8: Ion Implantation
9: Etch
10: CVD and Dielectric Thin Film
11: Metallization
12: CMP (Chemical Mechanical Polishing)
13: Process Integration
14: CMOS Processes
15: Summary and Future Trends
Index

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