Ion Sources
Ion implantation has become a basic technology in device manufacturing. For efficient use of this accelerator-based technique the choice of appropriate ion sources is important. This book deals with the design and operation of ion sources. Additionally the physics of ion formation of the various elements with different charge states and charge neutralization are discussed. Ion selection and beam diagnostics are part of the book too. The presentation of the necessary equations and diagrams for the various parameters makes this book useful as a handbook for ion sources.
1100050504
Ion Sources
Ion implantation has become a basic technology in device manufacturing. For efficient use of this accelerator-based technique the choice of appropriate ion sources is important. This book deals with the design and operation of ion sources. Additionally the physics of ion formation of the various elements with different charge states and charge neutralization are discussed. Ion selection and beam diagnostics are part of the book too. The presentation of the necessary equations and diagrams for the various parameters makes this book useful as a handbook for ion sources.
249.99 In Stock
Ion Sources

Ion Sources

Ion Sources

Ion Sources

Hardcover(1999)

$249.99 
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Overview

Ion implantation has become a basic technology in device manufacturing. For efficient use of this accelerator-based technique the choice of appropriate ion sources is important. This book deals with the design and operation of ion sources. Additionally the physics of ion formation of the various elements with different charge states and charge neutralization are discussed. Ion selection and beam diagnostics are part of the book too. The presentation of the necessary equations and diagrams for the various parameters makes this book useful as a handbook for ion sources.

Product Details

ISBN-13: 9783540657477
Publisher: Springer Berlin Heidelberg
Publication date: 12/10/1999
Edition description: 1999
Pages: 476
Product dimensions: 6.10(w) x 9.25(h) x 0.04(d)

Table of Contents

Introduction.- Gas Discharge Fundamentals.- Extraction System for Ion Sources.- Positive Ion Sources.- Giant Ion Sources.- Multiply Charged Ion Sources.- Mass and Energy Spectra of Ion Sources.- Negative Ion Sources.- Self-Neutralization of Beam Space Charge.- Beam Diagnostics for Ion Sources.
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