Laser Processing of Thin Films and Microstructures: Oxidation, Deposition and Etching of Insulators

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Product Details

  • ISBN-13: 9783642831386
  • Publisher: Springer Berlin Heidelberg
  • Publication date: 12/15/2011
  • Series: Springer Series in Materials Science , #3
  • Edition description: Softcover reprint of the original 1st ed. 1987
  • Edition number: 1
  • Pages: 320
  • Product dimensions: 6.14 (w) x 9.21 (h) x 0.69 (d)

Table of Contents

1. Introduction.- 1.1 Historical Background.- 1.2 Advantages of Laser Technology.- 1.3 Requirements for Laser Processing.- 1.4 Outline.- 2. Interaction and Kinetics.- 2.1 Laser Excitation of Matter.- 2.2 Laser Excitation of the Gas Species.- 2.2.1 Selective Vibrational Excitation.- 2.2.2 Selective Electronic Excitation.- 2.3 Interaction of Laser Radiation with Solids.- 2.3.1 Metals.- 2.3.2 Insulators and Semiconductors.- 2.3.3 Non linear Optical Absorption.- 2.3.4 Plasma Formation.- 2.4 Interactions with Surfaces and Adsorbates.- 2.4.1 Adsorbates.- 2.4.2 Desorption.- 2.4.3 Adsorption.- 2.5 Laser-Induced Heating.- 2.5.1 Thermalization.- 2.5.2 Heating Models.- 2.5.3 Impurity Incorporation.- 2.6 Nucleation and Growth.- 2.7 Chemical Reactions and Growth Rates.- 2.7.1 Low Intensity Levels.- 2.7.2 High Intensity Levels.- 2.7.3 CW Laser Controlled Reaction Rates.- 3. Experimental Considerations.- 3.1 Properties of Laser Beams.- 3.2 Spatial Resolution.- 3.3 Modes of Laser Processing.- 3.3.1 Geometrical Configurations.- 3.3.2 Pattern Generation.- 3.3.3 Process Uniformity and Reproducibility.- 3.3.4 Beam Profile Measurements.- 3.4 The Choice of Laser.- 4. Laser-Assisted Oxidation and Nitridation.- 4.1 Oxidation.- 4.2 Background and Theory.- 4.3 Metal Oxidation.- 4.4 Silicon Oxidation.- 4.4.1 Alternative Processing Techniques.- 4.4.2 Laser-induced Growth.- 4.4.3 Mechanisms of Photonically Enhanced Oxidation.- 4.4.4 Rapid Thermal Oxidation.- 4.5 Oxidation of Compound Semiconductors.- 4.6 Nitridation.- 4.6.1 Thermal Nitridation.- 4.6.2 Laser Nitridation.- 4.7 Laser Curing.- 5. Passivation by Laser Annealing and Melting.- 5.1 Modes of Laser Annealing.- 5.2 Laser Annealing in Oxygen.- 5.3 Oxygen Implantation.- 5.4 Nitrogen Implantation.- 5.5 Impurity Effects.- 5.6 Laser Cleaning of Surfaces.- 6. Laser-Induced Deposition.- 6.1 Background.- 6.2 Metal Oxides.- 6.3 Silicon Oxide.- 6.4 Silicon Nitride.- 6.5 Organic Polymer Formation.- 7. Material Removal.- 7.1 Introduction and Background.- 7.2 Etching.- 7.3 Ablation.- 7.4 Trimming.- 7.5 Cutting and Drilling.- 8. Summary and Conclusions.- 8.1 Properties and Applications.- 8.2 Future Prospects.- 8.3 Postscript.- References.
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