Laser Processing of Thin Films and Microstructures: Oxidation, Deposition and Etching of Insulators

Sending request ...

More About This Book

Product Details

  • ISBN-13: 9783642831386
  • Publisher: Springer Berlin Heidelberg
  • Publication date: 12/15/2011
  • Series: Springer Series in Materials Science , #3
  • Edition description: Softcover reprint of the original 1st ed. 1987
  • Edition number: 1
  • Pages: 320
  • Product dimensions: 6.14 (w) x 9.21 (h) x 0.69 (d)

Table of Contents

1. Introduction.- 1.1 Historical Background.- 1.2 Advantages of Laser Technology.- 1.3 Requirements for Laser Processing.- 1.4 Outline.- 2. Interaction and Kinetics.- 2.1 Laser Excitation of Matter.- 2.2 Laser Excitation of the Gas Species.- 2.2.1 Selective Vibrational Excitation.- 2.2.2 Selective Electronic Excitation.- 2.3 Interaction of Laser Radiation with Solids.- 2.3.1 Metals.- 2.3.2 Insulators and Semiconductors.- 2.3.3 Non linear Optical Absorption.- 2.3.4 Plasma Formation.- 2.4 Interactions with Surfaces and Adsorbates.- 2.4.1 Adsorbates.- 2.4.2 Desorption.- 2.4.3 Adsorption.- 2.5 Laser-Induced Heating.- 2.5.1 Thermalization.- 2.5.2 Heating Models.- 2.5.3 Impurity Incorporation.- 2.6 Nucleation and Growth.- 2.7 Chemical Reactions and Growth Rates.- 2.7.1 Low Intensity Levels.- 2.7.2 High Intensity Levels.- 2.7.3 CW Laser Controlled Reaction Rates.- 3. Experimental Considerations.- 3.1 Properties of Laser Beams.- 3.2 Spatial Resolution.- 3.3 Modes of Laser Processing.- 3.3.1 Geometrical Configurations.- 3.3.2 Pattern Generation.- 3.3.3 Process Uniformity and Reproducibility.- 3.3.4 Beam Profile Measurements.- 3.4 The Choice of Laser.- 4. Laser-Assisted Oxidation and Nitridation.- 4.1 Oxidation.- 4.2 Background and Theory.- 4.3 Metal Oxidation.- 4.4 Silicon Oxidation.- 4.4.1 Alternative Processing Techniques.- 4.4.2 Laser-induced Growth.- 4.4.3 Mechanisms of Photonically Enhanced Oxidation.- 4.4.4 Rapid Thermal Oxidation.- 4.5 Oxidation of Compound Semiconductors.- 4.6 Nitridation.- 4.6.1 Thermal Nitridation.- 4.6.2 Laser Nitridation.- 4.7 Laser Curing.- 5. Passivation by Laser Annealing and Melting.- 5.1 Modes of Laser Annealing.- 5.2 Laser Annealing in Oxygen.- 5.3 Oxygen Implantation.- 5.4 Nitrogen Implantation.- 5.5 Impurity Effects.- 5.6 Laser Cleaning of Surfaces.- 6. Laser-Induced Deposition.- 6.1 Background.- 6.2 Metal Oxides.- 6.3 Silicon Oxide.- 6.4 Silicon Nitride.- 6.5 Organic Polymer Formation.- 7. Material Removal.- 7.1 Introduction and Background.- 7.2 Etching.- 7.3 Ablation.- 7.4 Trimming.- 7.5 Cutting and Drilling.- 8. Summary and Conclusions.- 8.1 Properties and Applications.- 8.2 Future Prospects.- 8.3 Postscript.- References.
Read More Show Less

Customer Reviews

Be the first to write a review
( 0 )
Rating Distribution

5 Star

(0)

4 Star

(0)

3 Star

(0)

2 Star

(0)

1 Star

(0)

Your Rating:

Your Name: Create a Pen Name or

Barnes & Noble.com Review Rules

Our reader reviews allow you to share your comments on titles you liked, or didn't, with others. By submitting an online review, you are representing to Barnes & Noble.com that all information contained in your review is original and accurate in all respects, and that the submission of such content by you and the posting of such content by Barnes & Noble.com does not and will not violate the rights of any third party. Please follow the rules below to help ensure that your review can be posted.

Reviews by Our Customers Under the Age of 13

We highly value and respect everyone's opinion concerning the titles we offer. However, we cannot allow persons under the age of 13 to have accounts at BN.com or to post customer reviews. Please see our Terms of Use for more details.

What to exclude from your review:

Please do not write about reviews, commentary, or information posted on the product page. If you see any errors in the information on the product page, please send us an email.

Reviews should not contain any of the following:

  • - HTML tags, profanity, obscenities, vulgarities, or comments that defame anyone
  • - Time-sensitive information such as tour dates, signings, lectures, etc.
  • - Single-word reviews. Other people will read your review to discover why you liked or didn't like the title. Be descriptive.
  • - Comments focusing on the author or that may ruin the ending for others
  • - Phone numbers, addresses, URLs
  • - Pricing and availability information or alternative ordering information
  • - Advertisements or commercial solicitation

Reminder:

  • - By submitting a review, you grant to Barnes & Noble.com and its sublicensees the royalty-free, perpetual, irrevocable right and license to use the review in accordance with the Barnes & Noble.com Terms of Use.
  • - Barnes & Noble.com reserves the right not to post any review -- particularly those that do not follow the terms and conditions of these Rules. Barnes & Noble.com also reserves the right to remove any review at any time without notice.
  • - See Terms of Use for other conditions and disclaimers.
Search for Products You'd Like to Recommend

Recommend other products that relate to your review. Just search for them below and share!

Create a Pen Name

Your Pen Name is your unique identity on BN.com. It will appear on the reviews you write and other website activities. Your Pen Name cannot be edited, changed or deleted once submitted.

 
Your Pen Name can be any combination of alphanumeric characters (plus - and _), and must be at least two characters long.

Continue Anonymously

    If you find inappropriate content, please report it to Barnes & Noble
    Why is this product inappropriate?
    Comments (optional)