This short book is ideal for new workers in the semiconductor industry who want to be brought up to speed with minimum effort. It is also suitable for Chemical Engineering students studying plasma processing of materials; Engineers, physicists, and technicians entering the semiconductor industry who want a quick overview of the use of plasmas in the industry.
This short book is ideal for new workers in the semiconductor industry who want to be brought up to speed with minimum effort. It is also suitable for Chemical Engineering students studying plasma processing of materials; Engineers, physicists, and technicians entering the semiconductor industry who want a quick overview of the use of plasmas in the industry.

Lecture Notes on Principles of Plasma Processing
208
Lecture Notes on Principles of Plasma Processing
208Paperback(2003)
Product Details
ISBN-13: | 9780306474972 |
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Publisher: | Springer US |
Publication date: | 01/31/2003 |
Edition description: | 2003 |
Pages: | 208 |
Product dimensions: | 8.27(w) x 10.98(h) x 0.43(d) |