Mechanical Microsensors / Edition 1

Mechanical Microsensors / Edition 1

by Miko Elwenspoek, R. Wiegerink
     
 

ISBN-10: 3540675825

ISBN-13: 9783540675822

Pub. Date: 01/12/2001

Publisher: Springer Berlin Heidelberg

This book provides a comprehensive description of microsensors for mechanical quantities (flow, pressure, force, inertia) fabricated by silicon micromachining. Since the design of such sensors requires interdisciplinary teamwork, the presentation is made accessible to engineers trained in electrical and mechanical engineering, physics and chemistry. The reader is…  See more details below

Overview

This book provides a comprehensive description of microsensors for mechanical quantities (flow, pressure, force, inertia) fabricated by silicon micromachining. Since the design of such sensors requires interdisciplinary teamwork, the presentation is made accessible to engineers trained in electrical and mechanical engineering, physics and chemistry. The reader is guided through the micromachining fabrication process. A chapter on microsensor packaging completes the discussion of technological problems. The description of the basic physics required for sensor design includes the mechanics of deformation and the piezoresistive transduction to electrical signals. There is also a comprehensive discussion of resonant sensors, the hydrodynamics and heat transfer relevant for flow sensors, and, finally, electronic interfacing and readout circuitry. Numerous up-to-date case studies are presented, together with the working, fabrication and design of the sensors.

Product Details

ISBN-13:
9783540675822
Publisher:
Springer Berlin Heidelberg
Publication date:
01/12/2001
Series:
Microtechnology and MEMS Series
Edition description:
2001
Pages:
295
Product dimensions:
9.21(w) x 6.14(h) x 0.75(d)

Table of Contents

Introduction
MEMS
Micromachining
Mechanics of Membranes and Beams
Principles of Transduction for Mechanical sensors
Pressure Sensors
Force Sensors
Acceleration Sensors
Gyroscopes
Flow Sensors
Electronic Interfacing
Sensor Packaging

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