Mechanical Microsensors / Edition 1

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Overview

This book provides a comprehensive description of microsensors for mechanical quantities (flow, pressure, force, inertia) fabricated by silicon micromachining. Since the design of such sensors requires interdisciplinary teamwork, the presentation is made accessible to engineers trained in electrical and mechanical engineering, physics and chemistry. The reader is guided through the micromachining fabrication process. A chapter on microsensor packaging completes the discussion of technological problems. The description of the basic physics required for sensor design includes the mechanics of deformation and the piezoresistive transduction to electrical signals. There is also a comprehensive discussion of resonant sensors, the hydrodynamics and heat transfer relevant for flow sensors, and, finally, electronic interfacing and readout circuitry. Numerous up-to-date case studies are presented, together with the working, fabrication and design of the sensors.
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Editorial Reviews

From the Publisher
"Mechanical Microsensors provides a comprehensive description of the various design techniques required for silicon micromachining of sensors. This is a very well written book which has a pleasant balance of mathematical, physics and engineering principles, that make this book suitable for physicists, chemistry, electrical and mechanical engineers."

—SENSOR REVIEW

"Of particular value is the fact that the authors go further than the description of the silicon sensor elements and also present solutions on how to interface these sensors to the surrounding world - electronically in the chapter on 'Electronic Interfacing' as well as physically in the chapter on 'Packaging'. To summarize, this textbook gives a comprehensive overview of mechanical microsensors which is especially well suited for students in courses on mechanical microsensors, but is also valuable for people in research and industry with an interest in this exciting and growing field."

-MEASUREMENT SCIENCE AND TECHNOLOGY

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Product Details

  • ISBN-13: 9783540675822
  • Publisher: Springer Berlin Heidelberg
  • Publication date: 1/12/2001
  • Series: Microtechnology and MEMS Series
  • Edition description: 2001
  • Edition number: 1
  • Pages: 295
  • Product dimensions: 9.21 (w) x 6.14 (h) x 0.75 (d)

Table of Contents

Introduction
MEMS
Micromachining
Mechanics of Membranes and Beams
Principles of Transduction for Mechanical sensors
Pressure Sensors
Force Sensors
Acceleration Sensors
Gyroscopes
Flow Sensors
Electronic Interfacing
Sensor Packaging
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Preface

This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Switzerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged.

This book attempts to serve two purposes. First it gives an overview on mechanical microsensors (sensors for pressure, force, acceleration, angular rate and fluid flow, realized by silicon micromachining). Second, it serves as a textbook for engineers to give them a comprehensive introduction on the basic design issues of these sensors. Engineers active in sensor design are usually educated either in electrical engineering or mechanical engineering. These classical educational programs do not prepare the engineer for the challenging task of sensor design since sensors are instruments typically bridging the disciplines: one needs a rather deep understanding of both mechanics and electronics. Accordingly, the book contains discussion of the basic engineering sciences relevant to mechanical sensors, hopefully in a way that it is accessible for all colours of engineers. Engineering students in their 3`d or 4`" year should have enough knowledge to be able to follow the arguments presented in this book. In this sense, this book should be useful as textbook for students in courses on mechanical microsensors (as is currently being done at the University of Twente).

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