The MEMS Handbook (Mechanical Engineering)

The MEMS Handbook (Mechanical Engineering)

by Mohamed Gad-el-Hak
     
 

The revolution is well underway. Our understanding and utilization of microelectromechanical systems (MEMS) are growing at an explosive rate with a worldwide market approaching billions of dollars. In time, microdevices will fill the niches of our lives as pervasively as electronics do right now. But if these miniature devices are to fulfill their mammoth potential

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Overview

The revolution is well underway. Our understanding and utilization of microelectromechanical systems (MEMS) are growing at an explosive rate with a worldwide market approaching billions of dollars. In time, microdevices will fill the niches of our lives as pervasively as electronics do right now. But if these miniature devices are to fulfill their mammoth potential, today's engineers need a thorough grounding in the underlying physics, modeling techniques, fabrication methods, and materials of MEMS.

The MEMS Handbook delivers all of this and more. Its team of authors-unsurpassed in their experience and standing in the scientific community- explore various aspects of MEMS: their design, fabrication, and applications as well as the physical modeling of their operations. Designed for maximum readability without compromising rigor, it provides a current and essential overview of this fledgling discipline.

Product Details

ISBN-13:
9780849300776
Publisher:
Taylor & Francis
Publication date:
09/27/2001
Series:
Mechanical and Aerospace Engineering Series
Pages:
1368
Product dimensions:
7.32(w) x 10.30(h) x 2.63(d)

Table of Contents

Part I: Background and Fundamentals
Introduction, Mohamed Gad-el-Hak, University of Notre Dame
Scaling of Micromechanical Devices, William Trimmer, Standard MEMS, Inc., and Robert H. Stroud, Aerospace Corporation
Mechanical Properties of MEMS Materials, William N. Sharpe, Jr., Johns Hopkins University
Flow Physics, Mohamed Gad-el-Hak, University of Notre Dame
Integrated Simulation for MEMS: Coupling Flow-Structure-Thermal-Electrical Domains, Robert M. Kirby and George Em Karniadakis, Brown University, and Oleg Mikulchenko and Kartikeya Mayaram, Oregon State University
Liquid Flows in Microchannels, Kendra V. Sharp and Ronald J. Adrian, University of Illinois at Urbana-Champaign, Juan G. Santiago and Joshua I. Molho, Stanford University
Burnett Simulations of Flows in Microdevices, Ramesh K. Agarwal and Keon-Young Yun, Wichita State University
Molecular-Based Microfluidic Simulation Models, Ali Beskok, Texas A&M University
Lubrication in MEMS, Kenneth S. Breuer, Brown University
Physics of Thin Liquid Films, Alexander Oron, Technion, Israel
Bubble/Drop Transport in Microchannels, Hsueh-Chia Chang, University of Notre Dame
Fundamentals of Control Theory, Bill Goodwine, University of Notre Dame
Model-Based Flow Control for Distributed Architectures, Thomas R. Bewley, University of California, San Diego
Soft Computing in Control, Mihir Sen and Bill Goodwine, University of Notre Dame
Part II: Design and Fabrication
Materials for Microelectromechanical Systems Christian A. Zorman and Mehran Mehregany, Case Western Reserve University
MEMS Fabrication, Marc J. Madou, Nanogen, Inc.
LIGA and Other Replication Techniques, Marc J. Madou, Nanogen, Inc.
X-Ray-Based Fabrication, Todd Christenson, Sandia National Laboratories
Electrochemical Fabrication (EFAB), Adam L. Cohen, MEMGen Corporation
Fabrication and Characterization of Single-Crystal Silicon Carbide MEMS, Robert S. Okojie, NASA Glenn Research Center
Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide, Glenn M. Beheim, NASA Glenn Research Center
Microfabricated Chemical Sensors for Aerospace Applications, Gary W. Hunter, NASA Glenn Research Center, Chung-Chiun Liu, Case Western Reserve University, and Darby B. Makel, Makel Engineering, Inc.
Packaging of Harsh-Environment MEMS Devices, Liang-Yu Chen and Jih-Fen Lei, NASA Glenn Research Center
Part III: Applications of MEMS
Inertial Sensors, Paul L. Bergstrom, Michigan Technological University, and Gary G. Li, OMM, Inc.
Micromachined Pressure Sensors, Jae-Sung Park, Chester Wilson, and Yogesh B. Gianchandani, University of Wisconsin-Madison
Sensors and Actuators for Turbulent Flows. Lennart Löfdahl, Chalmers University of Technology, and Mohamed Gad-el-Hak, University of Notre Dame
Surface-Micromachined Mechanisms, Andrew D. Oliver and David W. Plummer, Sandia National Laboratories
Microrobotics Thorbjörn Ebefors and Göran Stemme, Royal Institute of Technology, Sweden
Microscale Vacuum Pumps, E. Phillip Muntz, University of Southern California, and Stephen E. Vargo, SiWave, Inc.
Microdroplet Generators. Fan-Gang Tseng, National Tsing Hua University, Taiwan
Micro Heat Pipes and Micro Heat Spreaders, G. P. "Bud" Peterson, Rensselaer Polytechnic Institute
Microchannel Heat Sinks, Yitshak Zohar, Hong Kong University of Science and Technology
Flow Control, Mohamed Gad-el-Hak, University of Notre Dame)
Part IV: The Future
Reactive Control for Skin-Friction Reduction, Haecheon Choi, Seoul National University
Towards MEMS Autonomous Control of Free-Shear Flows, Ahmed Naguib, Michigan State University
Fabrication Technologies for Nanoelectromechanical Systems, Gary H. Bernstein, Holly V. Goodson, and Gregory L. Snider, University of Notre Dame
Index

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