MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness / Edition 1

MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness / Edition 1

by Cenk Acar, Andrei Shkel
     
 

ISBN-10: 0387095357

ISBN-13: 9780387095356

Pub. Date: 10/23/2008

Publisher: Springer US

MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common…  See more details below

Overview

MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.

Product Details

ISBN-13:
9780387095356
Publisher:
Springer US
Publication date:
10/23/2008
Series:
MEMS Reference Shelf Series
Edition description:
2009
Pages:
260
Product dimensions:
6.30(w) x 9.30(h) x 0.70(d)

Table of Contents

Fundamentals of Micromachined Vibratory Gyroscopes.- Fundamentals of Micromachined Gyroscopes.- Fabrication Technologies.- Mechanical Design of MEMS Gyroscopes.- Electrical Design of MEMS Gyroscopes.- Structural Approaches to Improve Robustness.- Linear Multi DOF Architecture.- Torsional Multi DOF Architecture.- Distributed Mass Architecture.- Conclusions and Future Trends.

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