MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness / Edition 1

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Overview

MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.

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Editorial Reviews

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“This book reviews the principles of linear and torsional dynamics of vibratory gyroscopes. … The book provides a comprehensive review of the state-of-the-art of MCGs that would undoubtedly be useful for specialist engineers.” (Benu Chatterjee, Materials World, March, 2011)

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Product Details

  • ISBN-13: 9781441934895
  • Publisher: Springer US
  • Publication date: 11/9/2010
  • Series: MEMS Reference Shelf Series
  • Edition description: Softcover reprint of hardcover 1st ed. 2009
  • Edition number: 1
  • Pages: 260
  • Product dimensions: 0.57 (w) x 6.14 (h) x 9.21 (d)

Table of Contents

Introduction.- Fundamentals of micromachined gyroscopes.- Fabrication technologies.- Mechanical design of MEMS gyroscopes.- Electrical design of MEMS gyroscopes.- Linear multi-DOF architecture.- Torsional multiple-DOF architecture.- Distributed-Mass architecture.- Conclusions and future trends.

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