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Microactuators provides a comprehensive coverage of the emerging topic of microactuators that has attracted much attention in recent years. Largely owing to the microfabrication methods used in the microelectrics industry, microactuators are being developed at a very fast rate. Although there have been some excellent review articles covering parts of this important field, until now there has not been a single book devoted to its comprehensive coverage.
Microactuators covers the fundamentals of actuation in a textbook manner and it exposes the reader to some research examples. In combining fundamentals with the latest reported actuators, this book distinguishes itself from other monographs or textbooks.
The main intended audiences of Microactuators are academic and industrial researchers and graduate students interested in initiating projects in microactuators. It can also be used as a textbook for a senior/graduate level course in the general area of sensors and actuators.
1. Actuator Performance and Preliminaries. 2. Electrical Microactuators. 3. Magnetic Microactuators. 4. Thermal and Phase-Transformation Microactuators. 5. Optical Microactuators. 6. Mechanical and Acoustic Microactuators and Micropumps. 7. Chemical and Biological Microactuators. 8. Smart Structures. Subject Index.