Microchip Fabrication: A Practical Guide to Semicondutor Processing / Edition 3

Microchip Fabrication: A Practical Guide to Semicondutor Processing / Edition 3

by Peter Van Zant
     
 

ISBN-10: 0070672504

ISBN-13: 9780070672505

Pub. Date: 02/28/1997

Publisher: McGraw-Hill Companies, The

Microchip Fabrication describes the issues,science,processes,and materials involved in manufacturing microchips. The scope covers the established older processes and those required for fabrication of state-of-the-art ULSI circuits. This,to my knowledge,is the only book in the field that explains this complicated technology to a non-technical reader in clear terms…  See more details below

Overview

Microchip Fabrication describes the issues,science,processes,and materials involved in manufacturing microchips. The scope covers the established older processes and those required for fabrication of state-of-the-art ULSI circuits. This,to my knowledge,is the only book in the field that explains this complicated technology to a non-technical reader in clear terms without resorting to equations and higher math. It is read as a first book by non-professionals and professionals coming into the field. Its purpose as a self study text is two fold. One-workers in chip plants and/or in supplier companies can understand the work they do and its relationship to the whole fabrication process. Two-the book will provide the basic understanding and terminology to make more advanced texts and professional articles meaningful. It is written for use as a textbook for introductory courses for both in-plant or community college level use.

Product Details

ISBN-13:
9780070672505
Publisher:
McGraw-Hill Companies, The
Publication date:
02/28/1997
Edition description:
Older Edition
Pages:
623
Product dimensions:
6.32(w) x 9.35(h) x 1.65(d)

Table of Contents

Preface to the Third Edition
Ch. 1The Semiconductor Industry1
Ch. 2Semiconductor Materials and Process Chemicals25
Ch. 3Crystal Growth and Wafer Preparation49
Ch. 4Contamination Control67
Ch. 5Overview of Wafer Fabrication99
Ch. 6Process Yields119
Ch. 7Oxidation139
Ch. 8Photolithography - Preparation to Exposure191
Ch. 9Photolithography - Developing to Final Inspection245
Ch. 10Advanced Photolithographic Processes285
Ch. 11Doping311
Ch. 12Deposition351
Ch. 13Metallization389
Ch. 14Wafer Test and Evaluation419
Ch. 15Manufacturing Technology463
Ch. 16Semiconductor Devices and Integrated Circuit Formation491
Ch. 17Integrated Circuit Types531
Ch. 18Packaging549
Glossary587
Index607

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