Microelectromechanical Structures for Materials Research: Proceedings Materials Research Society Symposium

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Reports recent developments in a field that is coalescing but still lacks the coherence or certainty of a mature discipline in terms of accepted methodologies. The 39 papers discuss the resonance method as an attractive way to evaluate mechanical properties of thin gold films, heating effects on the Young's modulus of films sputtered onto micromachined resonators, test methods for characterizing piezoelectric thin films, polysilicon tensile testing with electrostatic gripping, silicon-based epitaxial films, and other aspects. Annotation c. by Book News, Inc., Portland, Or.
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Product Details

  • ISBN-13: 9781558994249
  • Publisher: Materials Research Society
  • Publication date: 7/1/1998
  • Pages: 248

Table of Contents

Materials Research Society Symposium Proceedings
Resonance Method: An Attractive Way to Evaluate Mechanical Properties of Thin Gold Films 3
Transversal Type Piezoelectric Resonator using ZnO Thin Film on Micro-Fabricated ELINVER (Fe-Ni-Cr-Ti) Alloy 9
Multilayer Microelectromechanical Structures For Material Property Characterization 15
The Effects of Texture and Doping on the Young's Modulus of Polysilicon 21
Mechanical Property Measurement of 0.5[mu]m CMOS Microstructures 27
Heating Effects on the Young's Modulus of Films Sputtered Onto Micromachined Resonators 33
Measurement of Mechanical Properties in Small Dimensions By Microbeam Deflection 39
Failure of Micron Scale Single Crystal Silicon Bars Due to Torsion Developed By MEMS Micro Instruments 45
Young's Modulus, Yield Strength and Fracture Strength of Microelements Determined By Tensile Testing 51
Round-Robin Tests of Modulus and Strength of Polysilicon 57
Curvature of a Cantilever Beam Subjected to an Equl-Biaxial Bending Moment 67
Meso (Intermediate)-Scale Electromechanical Systems For the Measurement and Control of Sagging in LTCC Structures 73
Observations of Low-Cycle Fatigue of Al Thin Films for MEMS Applications 81
Investigation of the Mechanical Properties and Adhesion of PVD Tungsten Films on Si and Silicon Compounds By Bulge and Blister Tests 87
Strength of Surface Micromachined Diaphragms 93
Silicon Oxynitride Membrane For Chemical Sensor Application 99
Bulge Test Investigation of the Influence of Moisture on Mechanical Properties of Thin Polymer Layers 105
A Novel Technique For the Fabrication of Free-Standing Adhesive Films Using a Polymer Template 111
Test Methods For Characterizing Piezoelectric Thin Films 117
Silicon Strength Testing For Mesoscale Structural Applications 123
Adhesion of Polysilicon Microbeams in Controlled Humidity Ambients 131
The Fracture Toughness of Polysilicon Microdevices 137
The Surface Modification with Fluorocarbon Thin Films For the Prevention of Stiction in MEMS 143
Adhesion Promotion By Surface-Modification at the PMMA-Metal Interface For LIGA-Type Processing 149
Buckling Evolution of Microelectromechanical Structures 155
MEMS as Temperature Sensors During High-Temperature Processing 161
Silicon-Framed Tensile Specimens: Techniques and Results 167
Mechanical Property Evaluation of Electroplated High Aspect Ratio Microstructures 173
Tensile Testing of Ultra-Thin-Film Materials Deposited on Polyimide For MEMS Applications 179
Mechanical and Metallographic Characterization of LIGA Fabricated Nickel and 80%Ni-20%Fe Permalloy 185
Polysilicon Tensile Testing With Electrostatic Gripping 191
Fracture Strength of Polycrystalline Silicon 197
Measurement of Elastic Modulus and Poisson's Ratio of Diamond-Like Carbon Films 203
Residual Stress of Silicon Films Deposited By LPCVD from Silane 209
Internal Stress of ZnO Thin Films Caused By Thickness Distribution and Crystallinity 215
Finite-Element Modelling of Residual Stress in SiC Diaphragms 221
Finite-Element Simulations of the Mechanical Stress in and Around Narrow TiSi[subscript 2] Lines 227
Silicon-Based Epitaxial Films For MEMS 233
Dopant Mapping and Strain Analysis in B Doped Silicon Structures Using Micro-Raman Spectroscopy 239
Author Index 245
Subject Index 247
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