Microsystem Technology / Edition 1

Microsystem Technology / Edition 1

by Wolfgang Menz, Jurgen Mohr, Oliver Paul
     
 

ISBN-10: 3527296344

ISBN-13: 9783527296347

Pub. Date: 03/28/2001

Publisher: Wiley, John & Sons, Incorporated

This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.  See more details below

Overview

This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.

Product Details

ISBN-13:
9783527296347
Publisher:
Wiley, John & Sons, Incorporated
Publication date:
03/28/2001
Pages:
512
Product dimensions:
6.98(w) x 9.48(h) x 1.24(d)

Table of Contents

General Introduction to Microstructure Technology
The Parallels to Microelectrics
The Basis and Materials in Microtechnology
Basic Principles of Vacuum Technology
Litography
The Silicon Micromechanics
The LIGA Process
Alternative Process of Microstructuring
Construction and Junction Techniques (CJT)
System Technology

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