Microsystem Technology / Edition 1

Hardcover (Print)
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Overview

This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.
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Editorial Reviews

From the Publisher
"...written by excellent experts in the field and gives a very deep and wide introduction to this important technology. The Text includes may practical examples already realized, and many details for the fabrication processes are explained. I can recommend this book without any restrictions tp engineers as well as physicists, and other scientists in this field." Optik
From The Critics
This introduction to microsystem technology covers the basic concepts in the field and recent trends in the discipline, with chapters on microstructure technology, microelectronics, physical and chemical aspects, MEMS, silicon and LIGA technology, lithography, alternative processes of microstructuring, system technology, and packaging and interconnecting techniques. The development of the technology and its practical applications are emphasized. Numerous b&w illustrations are included. The authors teach applied science and technology at European universities. Annotation c. Book News, Inc., Portland, OR (booknews.com)
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Product Details

  • ISBN-13: 9783527296347
  • Publisher: Wiley, John & Sons, Incorporated
  • Publication date: 3/28/2001
  • Edition number: 1
  • Pages: 512
  • Product dimensions: 6.98 (w) x 9.48 (h) x 1.24 (d)

Table of Contents

General Introduction to Microstructure Technology
The Parallels to Microelectrics
The Basis and Materials in Microtechnology
Basic Principles of Vacuum Technology
Litography
The Silicon Micromechanics
The LIGA Process
Alternative Process of Microstructuring
Construction and Junction Techniques (CJT)
System Technology
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