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Microwave Discharges: Fundamentals and Applications / Edition 1
     

Microwave Discharges: Fundamentals and Applications / Edition 1

by Michel Moisan, Carlos M. Ferreira
 

ISBN-10: 0306443554

ISBN-13: 9780306443558

Pub. Date: 01/01/1993

Publisher: Springer-Verlag New York, LLC

Proceedings of a NATO ARW held in Vimeiro, Portugal, May 11-15, 1992

Overview

Proceedings of a NATO ARW held in Vimeiro, Portugal, May 11-15, 1992

Product Details

ISBN-13:
9780306443558
Publisher:
Springer-Verlag New York, LLC
Publication date:
01/01/1993
Series:
NATO Science Series , #30
Pages:
574
Product dimensions:
7.35(w) x 10.31(h) x 1.54(d)

Related Subjects

Table of Contents

Surface Wave Discharges: Waves Propagation in Bounded Plasmas; C. Boisse-Laporte. Strongly Damped Surface Waves in Plasmas; G. Lister. Microwave Plasma Sources: Surface Wave Plasma Sources; Z. Zakrzewski, et al. ECR Plasma Sources; R. Wilhelm. Diagnostics: Optical Diagnostic for High Electron Density Plasmas; M. van de Sanden. Use of Emissive Probes in HF Plasmas; F.M. Dias. Modeling: Kinetic Modeling of Microwave Discharges; C.M. Ferreira. Time-Dependent EEDFs in Molecular Gases; M. Capitelli; et al. Light Sources: Applications of Microwave Discharges to High Power Light Sources; J. Waymouth. Applications: Semiconductor Processing Applications of Microwave Plasmas; J. Paraszczak, J. Heidenreich. Ion Bombardment Effects in Dual Microwave/Radio Frequency Plasmas; M. Wertheimer, L. Martinu. 24 additional articles. Index.

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