Nanofabrication: Nanolithography techniques and their applications

by Josï Marïa de Teresa (Editor), Francesc Perez Murano (Contribution by), Josï Ignacio Martïn (Contribution by)

Overview

A comprehensive edited volume on important and up-to-date nanolithography techniques and applications. Ideally suited for Master/PhD students who need a basic understanding of nanolithography techniques and their applications. The book also contains state-of-the-art information for researchers needing to expand their knowledge of nanofabrication.

Product Details

ISBN-13:	9780750326063
Publisher:	Institute of Physics Publishing
Publication date:	12/11/2020
Pages:	450
Sales rank:	816,876
Product dimensions:	7.00(w) x 10.00(h) x 1.00(d)

About the Author

José Maria De Teresa leads the group of Nanofabrication and Advanced Microscopies (NANOMIDAS) at the Institute of Nanoscience and Materials Science of Aragon (CSIC-University of Zaragoza, Spain). He is the coordinator of the Spanish network on nanolithography (NANOLITO) and the FI-SEM (focused ion beam - scanning electron microscopy) area in the Spanish National Facility for Advanced Microscopies. De Teresa is the Board Vice-Chair of the Condensed Matter Division in the European Physical Society. His main research interests are nanofabrication with focused electron and ion beams, magnetic nanostructures, nano-superconductivity and new materials.