Nonlithographic and Lithographic Methods of Nanofabrication - From Ultralarge Scale: Volume 636

Overview

Advances in information technology will have major socio-economic significance, and will rely heavily on technical and scientific progress in the field of nanotechnology. The challenge of building systems for fabrication at this level imposes a formidable pressure on the lithographic processes in terms of dimension tolerances (10nm or less) and positioning accuracy (1nm or less), to quote only a few specifications. Due to the costs of next generation lithographic machines, it is now felt that economically ...

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Overview

Advances in information technology will have major socio-economic significance, and will rely heavily on technical and scientific progress in the field of nanotechnology. The challenge of building systems for fabrication at this level imposes a formidable pressure on the lithographic processes in terms of dimension tolerances (10nm or less) and positioning accuracy (1nm or less), to quote only a few specifications. Due to the costs of next generation lithographic machines, it is now felt that economically reasonable improvements will focus mainly on the materials science aspect of the lithographic process - the development of advanced resists and smart materials. This book, first published in 2001, brings together researchers with a wide range of expertise in microelectronics, optics, magnetism, polymer synthesis and materials science. Topics include: advanced techniques and novel materials for nanolithography; unconventional approaches to nanofabrication and nanopatterning; self-assembled systems and chemical routes to nanostructures; photonic, electronic and magnetic properties of nanostructures and molecular devices.

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Product Details

  • ISBN-13: 9781558995468
  • Publisher: Cambridge University Press
  • Publication date: 1/1/2001
  • Series: MRS Proceedings Series
  • Pages: 370
  • Product dimensions: 6.20 (w) x 9.20 (h) x 1.00 (d)

Table of Contents

Preface
Acknowledgments
Material Research Society Symposium Proceedings
Status of Ion Projection Lithography
High Resolution Resists for Next Generation Lithography: The Nanocomposite Approach
Material Challenges and Alternatives for Advanced Photolithographic Patterning: From 193 to 157 nm and Beyond
Fullerene Nanocomposite Resist for Nanolithography
Self-Assembled Monolayers as High-Resolution Etch Masks and Templates for Organic Molecular Assembly
Relation Between Local Composition, Chemical Environment and Phase Shift Behavior in Cr-Based Oxycarbonitride Thin Films
Demonstration of Arrays of Sub-Micrometer Solid-State Fresnel Lenses for Electrons
Fabricating Two-Dimensional Metal Nanocrystal Arrays Using Pulsed-Laser Deposition and Focused Ion-Beam Technologies
Precise Characterization of Resists and Thin Gate Dielectrics in the VUV Range for 157 nm Lithography
Method for Measuring Profiles of Photoacid Patterns in Chemically Amplified Resists
Nanolithography by Electron Beam Resist-Trimming Technique
A FIB Micro-Sampling Technique and a Site-Specific TEM Specimen Preparation Method for Precision Materials Characterization
A Soft Lithographic Approach to the Fabrication of Single Crystalline Silicon Nanostructures with Well-Defined Dimensions and Shapes
Electrochemical Synthesis of Multi-Material Nanowires as Building Blocks for Functional Manostructures
Nanofabrication Using Self-Assembled Alumina Templates
Nanosphere Lithography: Self-Assembled Photonic and Magnetic Materials
A New Assembling Method for Nano-Sized Particles Using an Electrified Pattern Drawn by a Focused Ion Beam
Sub-100 nm Patterning of Aluminum Film by AFM Local Oxidation
Submicron Patterned Anodic Oxidation of Aluminum Thin Films
Electrodeposition of Three-Dimensionally Periodic Metal Meshes and Spheres
Magnetic Nanoparticle Arrays With Ultra-Uniform Length Electrodeposited in Highly Ordered Alumina Nanopores ("Alumite")
Fabrication of Helically Perforated Thin Films
Non-Lithographic Nanocolumn Fabrication With Application to Field Emitters
A New Simple Method for Fabrication of Fine Metal Patterns
Surface Patterning by Laser Induced Localized Chemistry
Development of Induced Crystallization as a Pattern Transfer Mechanism for Nanofabrication
Three-Dimensional Electronic Surfaces
BASIC: Bio-Inspired Assembly of Semiconductor Integrated Circuits
DNA Electrophoresis on Two-Dimensional Arrays of SiO[subscript 2] Beads
Imaging Oriented Aggregates of Lyotropic Chromatic Mesogenic Dyes by Atomic Microscopy
Monte Carlo Simulation of Amphiphile Self-Assembly During Dip Coating
Fabrication of Micro- and Nanostructures With Monodispersed Colloidal Spheres as the Active Components
Novel Colloidal Assembly Methods for the Preparation of Core-Shell Composite Materials
Low Pressure Band Tuning in Wurtzite CdSe Quantum Dots
Chromium Oxide Sub-Micron Particles Fabricated by a Unique Technique: Laser-Induced Solution Deposition
Spatially Controlled CdSe Nanocrystal Distribution in Phase Separated Polymer Blend Films
FTIR Spectrometry as a Quality Control Method for Surface Engineering of Nanomaterials
Quantum Coherence in Sub-10 nm Metal Wires
Dynamic Light Scattering at CdSe Nanocrystals and CdSe Cluster-Molecules
Fabrication of Photonic Crystals Using Metal Clusters as Nuclei for Self-Formation of Etching Masks
Preparation and Optical Properties of Au-Shell Submicron Polystyrene Particles
Direct Fabrication of All-Inorganic Logic Elements and Microelectromechanical Systems From Nanoparticle Precursors
Low-Voltage Electron Transport in Self-Assembled Nanocrystal Arrays
Structure of Self-Assembled Fe and FePt Nanoparticle Arrays
Magnetic Properties of 100 nm-Period Nickel Nanowire Arrays Obtained From Ordered Porous-Alumina Templates
Electrochemical Testing of Potential Molecular Devices
Electrical Rectification by a Monolayer of Hexadecylquinolinium Tricyanoquinodimethanide Sandwiched Between Gold Electrodes
New Method for First Principles of Electron Transport Through Nanoelectronic Devices
A Potential Interconnection Method in Molecular Electronic
Nanofabrication of Planar High Temperature Superconducting Josephson Junctions Using Focused Ion Beam Technology
Surface Potentials of Conjugated Molecular on Metal Surfaces: Measurements Using Electrostatic Force Microscopy and Calculations Using a Preliminary Physically-Based Model
Author Index
Subject Index
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