Plasma-Aided Nanofabrication: From Plasma Sources to Nanoassembly / Edition 1

Plasma-Aided Nanofabrication: From Plasma Sources to Nanoassembly / Edition 1

by Ken Ostrikov, Shuyan Xu
     
 

ISBN-10: 3527406336

ISBN-13: 9783527406333

Pub. Date: 09/17/2007

Publisher: Wiley

In this single work to cover the use of plasma as nanofabrication tool in sufficient depth internationally renowned authors with much experience in this important method of nanofabrication look at reactive plasma as a nanofabrication tool, plasma production and development of plasma sources, as well as such applications as carbon-based nanostructures,

Overview

In this single work to cover the use of plasma as nanofabrication tool in sufficient depth internationally renowned authors with much experience in this important method of nanofabrication look at reactive plasma as a nanofabrication tool, plasma production and development of plasma sources, as well as such applications as carbon-based nanostructures, low-dimensional quantum confinement structures and hydroxyapatite bioceramics. Written principally for solid state physicists and chemists, materials scientists, and plasma physicists, the book concludes with the outlook for such applications.

Product Details

ISBN-13:
9783527406333
Publisher:
Wiley
Publication date:
09/17/2007
Pages:
315
Product dimensions:
6.87(w) x 9.63(h) x 0.81(d)

Table of Contents

1 Introduction
2 What Makes Low-Temperature Plasmas a Versatile Nanotool?
3 Specific Examples and Practical Framework
4 Generation of Building andWorking Units
5 Transport, Manipulation, and Deposition of Building and Working Units
6 Surface Science of Plasma-Exposed Surfaces and Self-Organization Processes
7 Ion-Focusing Nanoscale Objects
8 Building and Working Units at Work: Applications in Nanoscale Materials Synthesis and Processing
9 Conclusions and Outlook
10 Appendix A. Reactions and Rate Coefficients in Low-Temperature PECVD of Carbon Nanostructures
11 Appendix B. Why plasma-based nanoassembly: many more reasons

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