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Polycrystalline Thin Films: Volume 403: Structure, Texture, Properties and Applications II
     

Polycrystalline Thin Films: Volume 403: Structure, Texture, Properties and Applications II

by Harold J. Frost (Editor), Elizabeth A. Holm (Editor), Michael A. Parker (Editor), Caroline A. Ross (Editor)
 

This interdisciplinary book brings together researchers from a wide range of scientific fields to offer insights into the nature of polycrystalline thin films. These films have properties that are different from those of a bulk polycrystal and from those of a single crystal film. In particular, the volume focuses on film deposition and processing techniques which

Overview

This interdisciplinary book brings together researchers from a wide range of scientific fields to offer insights into the nature of polycrystalline thin films. These films have properties that are different from those of a bulk polycrystal and from those of a single crystal film. In particular, the volume focuses on film deposition and processing techniques which allow the fabrication of films with innovative microstructures and technologically relevant properties. The work presented ranges from theoretical studies to technological applications. Topics include: microstructural evolution; interfaces and mechanical properties; characterization of microstructure; hard and refractory films; polycrystalline silicon; electrical properties; optical properties; gas sensors; ferroelectric films; metallization; and magnetic and MEMS applications.

Editorial Reviews

Booknews
Comprises the proceedings of the MRS symposium held in November/December 1995 in Boston. A total of 116 contributions are divided into the following sections: microstructural evolution; interfaces and mechanical properties; characterization of microstructure; hard and refractory films; polycrystalline silicon; electrical properties; optical properties; gas sensors; ferroelectric films; metallization; and magnetic and MEMS applications. Annotation c. by Book News, Inc., Portland, Or.

Product Details

ISBN-13:
9781558993068
Publisher:
Materials Research Society
Publication date:
09/28/1996
Series:
MRS Proceedings Series
Pages:
753
Product dimensions:
6.20(w) x 9.30(h) x 1.70(d)

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