Principles of Plasma Discharges and Materials Processing / Edition 2

Principles of Plasma Discharges and Materials Processing / Edition 2

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by Michael A. Lieberman, Alan J. Lichtenberg
     
 

ISBN-10: 0471720011

ISBN-13: 9780471720010

Pub. Date: 04/08/2005

Publisher: Wiley

A Thorough Update of the Industry Classic on Principles of Plasma Processing

The first edition of Principles of Plasma Discharges and Materials Processing, published over a decade ago, was lauded for its complete treatment of both basic plasma physics and industrial plasma processing, quickly becoming the primary reference for students and professionals.

The

Overview

A Thorough Update of the Industry Classic on Principles of Plasma Processing

The first edition of Principles of Plasma Discharges and Materials Processing, published over a decade ago, was lauded for its complete treatment of both basic plasma physics and industrial plasma processing, quickly becoming the primary reference for students and professionals.

The Second Edition has been carefully updated and revised to reflect recent developments in the field and to further clarify the presentation of basic principles. Along with in-depth coverage of the fundamentals of plasma physics and chemistry, the authors apply basic theory to plasma discharges, including calculations of plasma parameters and the scaling of plasma parameters with control parameters.

New and expanded topics include:

• Updated cross sections

• Diffusion and diffusion solutions

• Generalized Bohm criteria

• Expanded treatment of dc sheaths

• Langmuir probes in time-varying fields

• Electronegative discharges

• Pulsed power discharges

• Dual frequency discharges

• High-density rf sheaths and ion energy distributions

• Hysteresis and instabilities

• Helicon discharges

• Hollow cathode discharges

• Ionized physical vapor deposition

• Differential substrate charging

With new chapters on dusty plasmas and the kinetic theory of discharges, graduate students and researchers in the field of plasma processing should find this new edition more valuable than ever.

Product Details

ISBN-13:
9780471720010
Publisher:
Wiley
Publication date:
04/08/2005
Edition description:
REV
Pages:
800
Sales rank:
787,503
Product dimensions:
6.48(w) x 9.23(h) x 1.65(d)

Table of Contents

Basic Plasma Equations and Equilibrium.
Atomic Collisions.
Plasma Dynamics.
Diffusion and Transport.
DC Sheaths.
Chemical Reactions and Equilibrium.
Molecular Collisions.
Chemical Kinetics and Surface Processes.
Particle and Energy Balance in Discharges.
Capacitive Discharges.
Inductive Discharges.
Wave-Heated Discharges.
DC Discharges.
Etching.
Deposition and Implantation.
Appendices.
References.
Index.

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Principles of Plasma Discharges and Materials Processing 5 out of 5 based on 0 ratings. 1 reviews.
Guest More than 1 year ago
A very clear presentation of the basics of materials processing plasma. Chapter 10 is the single most important thing I've learned about plasma in 9 years of study and work.