Rapid Thermal Processing of Semiconductors / Edition 1

Rapid Thermal Processing of Semiconductors / Edition 1

by Victor Borisenko, Peter J. Hesketh
     
 

ISBN-10: 0306450542

ISBN-13: 9780306450549

Pub. Date: 05/31/1997

Publisher: Springer US

Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international…  See more details below

Overview

Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

Product Details

ISBN-13:
9780306450549
Publisher:
Springer US
Publication date:
05/31/1997
Series:
Microdevices Series
Edition description:
1997
Pages:
384
Product dimensions:
7.01(w) x 10.00(h) x 0.03(d)

Related Subjects

Table of Contents

Transient Heating of Semiconductors by Radiation. Recrystallization of Implanted Layers and Impurity Behavior in Silicon Crystals. Crystallization, Impurity Diffusion and Segregation in Polycrystalline Silicon. Component Evaporation, Defect Annealing and Impurity Diffusion in the III-V Semicondutors. Diffusion Synthesis of Silicides in Thin Film Metal-Silicon Structures. Rapid Thermal Oxidation and Nitridation. Rapid Thermal Chemical Vapor Deposition. Indexes.

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