Recent Developments in Oxide and Metal Epitaxy: Volume 619: Theory and Experiment

Overview

Thin-film epitaxy is integral to many current and emerging technologies, and continued progress in solving critical issues is essential to the realization of new devices. This book, first published in 2000, focuses on progress in solving fundamental issues in the epitaxial growth of metals and oxides. Insights from both experiment, and modeling are combined to facilitate cross fertilization of ideas and understanding. Highlighted is the use of in situ characterization techniques for enhancing the efficiency of ...

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Overview

Thin-film epitaxy is integral to many current and emerging technologies, and continued progress in solving critical issues is essential to the realization of new devices. This book, first published in 2000, focuses on progress in solving fundamental issues in the epitaxial growth of metals and oxides. Insights from both experiment, and modeling are combined to facilitate cross fertilization of ideas and understanding. Highlighted is the use of in situ characterization techniques for enhancing the efficiency of materials development. Thin-film research is often empirical in nature. Techniques for minimizing the time spent exploring the complex parameter space in order to optimize growth and processing conditions are of particular value. Among the techniques discussed are spectroscopic ellipsometry and ion scattering and recoil spectrometry, LEEM (low-energy electron microscopy), STM (scanning tunneling microscopy), TEM (transmission electron microscopy) and RHEED (reflection high-energy electron diffraction). Topics include: growth and dynamics of metal films; structure and oxidation of metal films and surfaces; in situ studies of oxide growth and epitaxial growth of oxides.

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Editorial Reviews

Booknews
Contains 28 papers presented at the April 2000 symposium on the epitaxial growth of metals and oxides. One particular aspect highlighted is the use of in situ characterization techniques for enhancing the efficiency of materials development. Topics include control of variants in heteroepitaxy by substrate miscut, modeling of metal(100) homoepitaxial film growth at very low temperatures, in situ study of barrier layers using spectroscopic ellipsometry and mass spectroscopy of recoiled ions, and solution synthesis of epitaxial rare earth oxide thin films on roll-textured nickel. Annotation c. Book News, Inc., Portland, OR (booknews.com)
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Product Details

  • ISBN-13: 9781558995277
  • Publisher: Cambridge University Press
  • Publication date: 1/1/2000
  • Series: MRS Proceedings Series
  • Pages: 218
  • Product dimensions: 6.10 (w) x 9.20 (h) x 0.70 (d)

Table of Contents

Dedication ix
Preface xi
Acknowledgments xiii
Materials Research Society Symposium Proceedings xiv
Growth and Dynamics of Metal Films
Control of Variants in Heteroepitaxy by Substrate Miscut 3
Kinetic Roughening of Multilayer Ag/Ag(100) Films: Complex Temperature-Dependence in a Simple System 15
Real Time Observations of Dislocation-Mediated Plasticity in the Epitaxial Al (011)/Si(100) Thin Film System 27
Spatial Correlations in Growing Films 35
Modeling of Metal(100) Homoepitaxial Film Growth at Very Low Temperatures 49
Structure and Oxidation of Metal Films and Surfaces
Observation of a New Ordered Structure of Oxygen on W(110) 57
Heteroepitaxy: The Missing Link Between Surface Chemistry and Dry Corrosion 63
A Novel Method for True Work Function Determination of Metal Surfaces by Combined Kelvin Probe and Photoelectric Effect Measurements 73
Thickness Dependent Tetragonal Relaxation of Iron in Epitaxial Fe/Pd Multilayer Films 79
Equilibrated Surface Alloys and the Influence of Strain 85
Elaboration of Single Crystalline Au/Ni[subscript 80]Fe[subscript 20]/Cu/Ni[subscript 80]Fe[subscript 20]/NiO(111) Spin Valves 91
Reactive Cluster Epitaxy: CoSi[subscript 2] Nanoparticles on (111) Si 97
In Situ Studies of Oxide Growth
The Importance of In Situ Monitors in the Preparation of Layered Oxide Heterostructures by Reactive MBE 105
Oxidation Kinetics in SrTiO[subscript 3] Homoepitaxy 115
The Effect of Magnesium Oxide Buffer on the Epitaxial Growth of Zinc Oxide on Sapphire 123
Epitaxial Growth of Co[subscript 3]O[subscript 4] Films by Low Temperature, Low Pressure Chemical Vapor Deposition 129
In Situ Study of Barrier Layers Using Spectroscopic Ellipsometry and Mass Spectroscopy of Recoiled Ions 135
In Situ Real-Time Studies of Oxygen Incorporation in Complex Oxide Thin Films Using Spectroscopic Ellipsometry and Ion Scattering and Recoil Spectrometry 141
Epitaxial Growth of Oxides
Metalorganic Molecular Beam Epitaxy of Magnesium Oxide on Silicon 149
Epitaxial Oxide Films on Silicon: Growth, Modeling and Device Properties 155
Optical Properties of Thin-Film SrTiO[subscript 3] on Si Grown by MBE 167
Modeling of the Transition From Active to Passive Oxidation of Si(100) 173
Two Step Process for the Growth of a Thin Layer of Silicon Dioxide for Tunneling Effect Applications 179
Structure Characterization of Epitaxial Strain Relaxation in YBa[subscript 2]Cu[subscript 3]O[subscript 7-x]/PrBa[subscript 2]Cu[subscript 3]O[subscript 7] Superlattices 185
Epitaxial Growth of Cerium Oxide Buffer Layers on MgO, YSZ and Sapphire Substrates 191
Cracking and Delamination of Heteroepitaxial Barium Hexaferrite Films 197
Solution Synthesis of Epitaxial Rare-Earth Oxide Thin Films on Roll-Textured Nickel 203
Microscopical Study of the Structural Evolution of Sol-Gel Derived Buffer Layers for the Integration of YBCO on Biaxially Textured Nickel 209
Author Index 215
Subject Index 217
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