RF MEMS: Theory, Design, and Technology / Edition 1

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Overview

Suitable as a tutorial for electrical and computer engineering students, or as an up-to-date reference for practicing circuit designers, RF MEMS provides the most comprehensive available survey of this new and important technology.
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Editorial Reviews

From the Publisher
"...an excellent book for graduate students or practicing engineers in the field of RF microwave technology who need to learn about the latest developments in the RF MEMS world." (IEEE Electrical Insulation Magazine, November/December 2004)

"It provides the most comprehensive survey of this new and important technology.” (Microwave Journal, January 2004)

"...an invaluable addition to the research library, and highly recommended to all interested in this fascinating technology." (Microwaves & RF, June 2003)

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Product Details

  • ISBN-13: 9780471201694
  • Publisher: Wiley, John & Sons, Incorporated
  • Publication date: 2/24/2003
  • Edition description: New Edition
  • Edition number: 1
  • Pages: 512
  • Product dimensions: 7.30 (w) x 10.16 (h) x 1.24 (d)

Meet the Author

GABRIEL M. REBEIZ received his PhD from the California Institute of Technology. He was the recipient of the National Science Foundation Presidential Young Investigator Award, and in 2000 was the corecipient of the IEEE Microwave Prize. A Fellow of the IEEE and a consultant to Rockwell, Samsung, Intel, Standard MEMS, and Agilent, he has published extensively in the field of microwave technology and in the area of RF MEMS. He was at the University of Michigan, Ann Arbor, and is now a Professor of Electrical and Computer Engineering at the University of California, San Diego.
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Table of Contents

Preface
1 Introduction: RF MEMS for Microwave Applications 1
2 Mechanical Modeling of MEMS Devices: Static Analysis 21
3 Mechanical Modeling of MEMS Devices: Dynamic Analysis 59
4 Electromagnetic Modeling of MEMS Switches 87
5 MEMS Switch Library 121
6 MEMS Switch Fabrication and Packaging 157
7 MEMS Switch Reliability and Power Handling 185
8 Design of MEMS Switch Circuits 221
9 MEMS Phase Shifters 259
10 Distributed MEMS Phase Shifters and Switches 297
11 MEMS Varactors and Tunable Oscillators 327
12 Micromachined Inductors 359
13 Reconfigurable MEMS Networks, Filters, Antennas, and Subsystems 383
14 Phase Noise Analysis of MEMS Circuits, Phase Shifters, and Oscillators 429
15 Future Work in RF MEMS 449
App. A Detailed Analysis and Measurements of Intermodulation Distortion and Power Handling in RF MEMS Switches, Varactors, and Tunable Filters 457
App. B Mechanical, Electrical, and Thermal Properties of RF MEMS Materials 473
Index 479
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