Scanning Electron Microscopy and X-ray Microanalysis / Edition 3

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More About This Textbook

Overview

This text provides students as well as practitioners with a comprehensive introduction to the field of scanning electron microscopy (SEM) and X-ray microanalysis. The authors emphasize the practical aspects of the techniques described. Topics discussed include user-controlled functions of scanning electron microscopes and x-ray spectrometers and the use of x-rays for qualitative and quantitative analysis. Separate chapters cover SEM sample preparation methods for hard materials, polymers, and biological specimens. In addition techniques for the elimination of charging in non-conducting specimens are detailed.

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Product Details

  • ISBN-13: 9780306472923
  • Publisher: Springer-Verlag New York, LLC
  • Publication date: 1/31/2003
  • Edition description: 3rd Corrected ed. 2003. Corr. 2nd printing 2007
  • Edition number: 3
  • Pages: 586
  • Sales rank: 391,958
  • Product dimensions: 7.10 (w) x 10.20 (h) x 1.40 (d)

Table of Contents

1 Introduction 1
2 The SEM and Its Modes of Operation 21
3 Electron Beam-Specimen Interactions 61
4 Image Formation and Interpretation 99
5 Special Topics in Scanning Electron Microscopy 195
6 Generation of X-Rays in the SEM Specimen 271
7 X-Ray Spectral Measurement: EDS and WDS 297
8 Qualitative X-Ray Analysis 355
9 Quantitative X-Ray Analysis: The Basics 391
10 Special Topics in Electron Beam X-Ray Microanalysis 453
11 Specimen Preparation of Hard Materials: Metals, Ceramics, Rocks, Minerals, Microelectronic and Packaged Devices, Particles, and Fibers 537
12 Specimen Preparation of Polymer Materials 565
13 Ambient-Temperature Specimen Preparation of Biological Material 591
14 Low-Temperature Specimen Preparation 621
15 Procedures for Elimination of Charging in Nonconducting Specimens 647
Index 675
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