Semiconductor Manufacturing Technology / Edition 1

Semiconductor Manufacturing Technology / Edition 1

by Michael Quirk, Julian Serda
     
 

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ISBN-10: 0130815209

ISBN-13: 9780130815200

Pub. Date: 11/09/2000

Publisher: Prentice Hall

In this book, Quirk and Serda introduce the terminology, concepts, processes, products, and equipment commonly used in the manufacture of ultra large scale integrated (ULSI) semiconductors. The book provides helpful, up-to-date technical information about semiconductor manufacturing and strikes an effective balance between the process and

Overview

In this book, Quirk and Serda introduce the terminology, concepts, processes, products, and equipment commonly used in the manufacture of ultra large scale integrated (ULSI) semiconductors. The book provides helpful, up-to-date technical information about semiconductor manufacturing and strikes an effective balance between the process and equipment technology found in wafer fabrications. Topics include copper interconnect; dual damascene additive process for metallization; deep UV sub-micron photolithography (.18 micron and below); low-k dielectric processing; chemical mechanical planarization; a comprehensive model of manufacturing process; chemical-mechanical polish (CMP); and maintenance and troubleshooting. For practicing semiconductor manufacturing technicians or those interested in semiconductor manufacturing technology and processes.

Product Details

ISBN-13:
9780130815200
Publisher:
Prentice Hall
Publication date:
11/09/2000
Edition description:
New Edition
Pages:
666
Product dimensions:
8.20(w) x 10.80(h) x 1.60(d)

Table of Contents

1. Introduction to the Semiconductor Industry.

2. Characteristics of Semiconductor Materials.

3. Device Technologies.

4. Silicon and Wafer Preparation.

5. Chemicals in Semiconductor Fabrication.

6. Contamination Controls in Wafer Fabs.

7. Metrology and Defect Inspection.

8. Gas Control in Process Chambers.

9. IC Fabrication Process Overview.

10. Oxidation.

11. Deposition.

12. Metallization.

13. Photolithography: Vapor Prime to Soft Bake.

14. Photolithography: Alignment and Exposure.

15. Photolithography: Photoresist Development and Advanced Lithography.

16. Etch.

17. Ion Implant.

18. Chemical Mechanical Planarization.

19. Wafer Test.

20. Assembly and Packaging.

Appendices.

Glossary.

Index.

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