Silicide Thin Films: Volume 402: Fabrication, Properties and Applications

Silicide Thin Films: Volume 402: Fabrication, Properties and Applications

by Leslie H. Allen, Karen Maex, Paul W. Pellegrini, Ray Tung
     
 

Tremendous advances have been made in the use of silicides as contacts and interconnects in micro-electronic devices and as active layers in sensors. A flourish of novel fabrication concepts and characterization techniques has led to high-quality silicide devices and a better understanding of the electronic and micrometallurgical properties of their interfaces.

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Overview

Tremendous advances have been made in the use of silicides as contacts and interconnects in micro-electronic devices and as active layers in sensors. A flourish of novel fabrication concepts and characterization techniques has led to high-quality silicide devices and a better understanding of the electronic and micrometallurgical properties of their interfaces. However, the shrinking physical dimensions of ULSI devices beyond the deep submicron regime now poses new and serious materials challenges for the development of manufacturable silicide processes. Scientists and engineers from materials science, physics, chemistry, device, processing and other disciplines come together in this book to examine the current issues facing silicide thin-film applications. Topics include: silicide fundamentals - energetics and kinetics; processing of silicide thin films; ULSI issues; CVD silicides; semiconducting silicides; processing of germano-silicide thin films; silicides and analogs for IR detection; interfaces, surfaces and epitaxy; novel structures and techniques and properties of silicide thin films.

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Editorial Reviews

Booknews
From only the second MRS symposium on silicide thin films in 17 years, about 90 papers discuss the latest advances in the venerable material, and speculate on new directions for the future. The sections cover fundamental energetics and kinetics, processing, ULSI issues, CVD studies, semiconducting silicides, germano-silicide thin films, analogs for infrared detection, interfaces and epitaxy, novel structures and techniques, and properties. Annotation c. Book News, Inc., Portland, OR (booknews.com)

Product Details

ISBN-13:
9781558993051
Publisher:
Materials Research Society
Publication date:
03/28/1996
Series:
MRS Proceedings Series, #40
Pages:
648
Product dimensions:
6.40(w) x 9.30(h) x 1.60(d)

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