Silicon Anodization as a Structuring Technique: Literature Review, Modeling and Experiments

by Alexey Ivanov

Overview

Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.

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Product Details

ISBN-13:	9783658192372
Publisher:	Springer Fachmedien Wiesbaden
Publication date:	09/12/2017
Edition description:	1st ed. 2018
Pages:	316
Product dimensions:	5.83(w) x 8.27(h) x (d)

About the Author

Alexey Ivanov is currently working as a research scientist at the Fraunhofer Institute for Solar Energy Systems (Fraunhofer ISE, Germany) on developing and optimizing anodization processes for large-scale fabrication of semiconductor photovoltaic cells and batteries.

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Table of Contents

Silicon Anodization: State of the Art.- Experimental, Characterization and Simulation Methods.- Microscale Study of Anodization Process.- Anodization Process as a Structuring Technique: Experiments and Simulation.​