Silicon Nitride and Silicon Dioxide Thin Insulating Films: 4th International Symposium

Silicon Nitride and Silicon Dioxide Thin Insulating Films: 4th International Symposium

by M. J. Deen
     
 

Product Details

ISBN-13:
9781566771375
Publisher:
Electrochemical Society, Incorporated
Publication date:
08/28/1997
Series:
Proceedings Series
Pages:
588

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