Silicon Processing for the VLSI Era: The Submicron MOSFET / Edition 1

Silicon Processing for the VLSI Era: The Submicron MOSFET / Edition 1

by Stanley Wolf
     
 

ISBN-10: 0961672153

ISBN-13: 9780961672157

Pub. Date: 01/28/1995

Publisher: Lattice Press

Silicon Processing For The VLSI Era is a three-volume treatise which provides a comprehensive, up-to-date treatment of this technology. Volume 1 covers the details of individual process steps used in fabricating silicon ICs. Volume 2 describes how these process steps are combined to make VLSI and ULSI structures. Volume 3 discusses the physics of MOS devices,

Overview

Silicon Processing For The VLSI Era is a three-volume treatise which provides a comprehensive, up-to-date treatment of this technology. Volume 1 covers the details of individual process steps used in fabricating silicon ICs. Volume 2 describes how these process steps are combined to make VLSI and ULSI structures. Volume 3 discusses the physics of MOS devices, emphasizing the link between submicron MOSFETs and their manufacturing processes. The books are an outgrowth of a set of intensive seminars conducted through the University of California Berkeley, Engineering Extension, for the past fifteen years. Over four thousand engineers and managers from more than 75 companies and government agencies have taken these courses since they were first presented in 1984.

Product Details

ISBN-13:
9780961672157
Publisher:
Lattice Press
Publication date:
01/28/1995
Edition description:
New Edition
Pages:
722

Table of Contents

1. Role of Process & Device Models in Microelectronics Technology
2. Numerical Methods for Solving the Partial Differential Equations which Model Submicron Devices and Processes
3. Basic MOS Physics & MOS Capacitors
4. Long-Channel MOSFETs
5. The Submicron MOSFET
6. Isolation Structures in CMOS
7. Thin Gate Oxides: Growth & Reliability
8. Well Formation in CMOS
9. Hot-Carrier Resistant Processing & Device Structures

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