Silicon Sensors and Circuits: On-chip compatibility

by R.F. Wolffenbuttel (Editor)

Overview

Silicon sensors integrated with readout circuits on one chip are now being considered for a wide and growing range of applications. Technological compatibility constraints and the need for economic large-scale production are now the major concerns if these devices are to become widely used in industry and medicine. This is the first book to attempt to evaluate the real prospects and limitations of integrated silicon smart sensors. It provides a thorough introduction to and review of, the field, covering both technical and economic issues critical to the future success of this technology.

Product Details

ISBN-13:	9780412709708
Publisher:	Springer Netherlands
Publication date:	11/30/1995
Series:	Sensor Physics and Technology Series , #3
Edition description:	1995
Pages:	314
Product dimensions:	5.51(w) x 8.50(h) x 0.03(d)

Table of Contents

On-chip functional integration. Development of compatible micromachining processes in silicon. Compatibility of piezoelectric zinc oxide with silicon IC processing. Economics of on-chip functional integration. On-chip functional integration in micromechanical sensors. Sensor and circuit integration in biomedical applications. Smart sensors in automobiles. Conclusions. Glossary. Index.

Editorial Reviews

This book evaluates the real prospects and limitations of integrated silicon sensors. It provides a thorough introduction to the field, considering transduction effects, micromaching processes and zinc-oxide-on-silicon devices. - Aslib Book Guide; It provides a thorough introduction to and review of the field, covering both technical and economic issues critical to the future success of this techology. - Sensors and Materials; ...this book has a great deal to offer students and practicing control engineers throughout industry and research. - Control and Instrumentation; ...an interesting and thought-provoking account of integrated silicon-sensors, and would recommend it as a useful introduction to the topic...an in-depth study of the technology. - Measurement and Control

From the Publisher