Thin Film Materials Technology: Sputtering of Compound Materials

Thin Film Materials Technology: Sputtering of Compound Materials

by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi
     
 

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An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and…  See more details below

Overview

An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts, among other topics. In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering.

Product Details

ISBN-13:
9780815519317
Publisher:
Elsevier Science
Publication date:
05/10/2004
Sold by:
Barnes & Noble
Format:
NOOK Book
Pages:
532
File size:
20 MB
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This product may take a few minutes to download.

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