This is not available 053198

Paperback (Print)
Not Available on

More About This Textbook


The drive towards increased packaging density relies on the stacking of die layers in multi-chip modules (MCMs). Extremely high integration density can be achieved with these modules. There are two fundamental methods for maximizing functional density in a MCM. Either the individual die or the entire packaged die layer can be thinned. In both cases, die thinning and packaging methods must be developed. A detailed process for thinning individual die to sub-35 mum is outlined. The process consists of pseudo-wafer lamination, lapping, chemical mechanical planarization (CMP), and die release. A pseudo-wafer is created by adhering die to a glass substrate. Mechanical lapping is used to remove the bulk silicon and reduce die thickness to approximately 50 mum. CMP is used to attain thicknesses of sub-35 mum and remove the silicon damage layer. This process can reliably produce die thinned to sub-35 mum with +/- 1.5 mum total thickness variation (TTV) and good surface characteristics. The die are released from the glass substrate and encapsulated in a dielectric material. Multiple die layers can be stacked to form a MCM. For packaged layer thinning, a method is developed to encapsulate thick die in a dielectric material on a cavity wafer. Frontside processing creates multiple layers of interconnects. The encapsulated die layer is thinned to approximately 75 mum and backside processing is performed. These layers are subsequently bonded and interconnected to create the MCM.
Read More Show Less

Product Details

  • ISBN-13: 9781248970225
  • Publisher: BiblioLabsII
  • Publication date: 5/4/2012
  • Pages: 120
  • Product dimensions: 8.00 (w) x 10.00 (h) x 0.31 (d)

Customer Reviews

Be the first to write a review
( 0 )
Rating Distribution

5 Star


4 Star


3 Star


2 Star


1 Star


Your Rating:

Your Name: Create a Pen Name or

Barnes & Review Rules

Our reader reviews allow you to share your comments on titles you liked, or didn't, with others. By submitting an online review, you are representing to Barnes & that all information contained in your review is original and accurate in all respects, and that the submission of such content by you and the posting of such content by Barnes & does not and will not violate the rights of any third party. Please follow the rules below to help ensure that your review can be posted.

Reviews by Our Customers Under the Age of 13

We highly value and respect everyone's opinion concerning the titles we offer. However, we cannot allow persons under the age of 13 to have accounts at or to post customer reviews. Please see our Terms of Use for more details.

What to exclude from your review:

Please do not write about reviews, commentary, or information posted on the product page. If you see any errors in the information on the product page, please send us an email.

Reviews should not contain any of the following:

  • - HTML tags, profanity, obscenities, vulgarities, or comments that defame anyone
  • - Time-sensitive information such as tour dates, signings, lectures, etc.
  • - Single-word reviews. Other people will read your review to discover why you liked or didn't like the title. Be descriptive.
  • - Comments focusing on the author or that may ruin the ending for others
  • - Phone numbers, addresses, URLs
  • - Pricing and availability information or alternative ordering information
  • - Advertisements or commercial solicitation


  • - By submitting a review, you grant to Barnes & and its sublicensees the royalty-free, perpetual, irrevocable right and license to use the review in accordance with the Barnes & Terms of Use.
  • - Barnes & reserves the right not to post any review -- particularly those that do not follow the terms and conditions of these Rules. Barnes & also reserves the right to remove any review at any time without notice.
  • - See Terms of Use for other conditions and disclaimers.
Search for Products You'd Like to Recommend

Recommend other products that relate to your review. Just search for them below and share!

Create a Pen Name

Your Pen Name is your unique identity on It will appear on the reviews you write and other website activities. Your Pen Name cannot be edited, changed or deleted once submitted.

Your Pen Name can be any combination of alphanumeric characters (plus - and _), and must be at least two characters long.

Continue Anonymously

    If you find inappropriate content, please report it to Barnes & Noble
    Why is this product inappropriate?
    Comments (optional)