| Preface | xi |
| Chapter 1 | Introduction to Vacuum Mechatronics | 1 |
| Chapter 2 | Vacuum Environment and Applications | 11 |
| 2.1 | Vacuum Fundamentals | 11 |
| 2.2 | Artificial Vacuum | 12 |
| 2.3 | Natural Vacuum | 20 |
| 2.4 | Vacuum: Advantages and Disadvantages | 21 |
| 2.5 | Applications | 22 |
| Reprints | |
| The National Bureau of Standards Primary High-vacuum Standard | 25 |
| How to Select High Vacuum Pumps | 33 |
| Aluminum Alloy Ultrahigh Vacuum System for Molecular Beam Epitaxy | 43 |
| Advances in Vacuum Contamination Control for Electronic Materials Processing | 49 |
| Particle Control for Semiconductor Processing in Vacuum Systems | 55 |
| Mechanisms of Contaminant Particle Production, Migration and Adhesion | 63 |
| Control of Particulate Emissions from Plasma-Etching Systems | 69 |
| Vacuum Systems for Microelectronics | 75 |
| Manufacturing in a Vacuum Environment | 81 |
| Chapter 3 | Vacuum Mechatronics Fundamentals | 87 |
| 3.1 | Materials | 87 |
| 3.2 | Lubrication | 96 |
| 3.3 | Energy Transfer | 105 |
| Reprints | |
| Space Environment and Vacuum Properties of Spacecraft Materials | 111 |
| Materials for Ultrahigh Vacuum | 119 |
| Analysis of Outgassing Characteristics of Metals | 135 |
| Lubricating of Mechanisms for Vacuum Service | 139 |
| Considerations of the Lubrication of Spacecraft Mechanisms | 145 |
| Contact Heat Transfer-The Last Decade | 165 |
| Chapter 4 | Vacuum Mechatronics Components | 179 |
| 4.1 | Actuators | 179 |
| 4.2 | Sensors | 185 |
| 4.3 | Energy Transmission | 189 |
| 4.4 | Machine Elements | 193 |
| 4.5 | Magnetic Levitation | 196 |
| Reprints | |
| Ultrahigh Vacuum Line Components | 203 |
| Ultrahigh Vacuum Leak Sealing with a Silicon Resin Product | 215 |
| A Simple Ultrahigh Vacuum Shape Memory Effect Shutter Mechanism | 217 |
| Robotic Joint Experiments Under Ultravacuum | 219 |
| Chapter 5 | Vacuum Mechatronics Control | 237 |
| 5.1 | Introduction | 237 |
| 5.2 | Basic Issues | 239 |
| 5.3 | Selected Papers | 242 |
| Reprints | |
| Approach to the Dynamically Reconfigurable Robotic Systems | 245 |
| The Central Nervous System as a Low and High Level Control System | 263 |
| Logical Sensor Systems | 281 |
| Chapter 6 | Vacuum Mechatronic Systems and Applications | 307 |
| 6.1 | System Components | 307 |
| 6.2 | Applications for Microelectronics | 310 |
| 6.3 | Applications for Space | 311 |
| 6.4 | Other Applications | 312 |
| 6.5 | The Future of Vacuum Mechatronics | 313 |
| Reprints | |
| Canadarm and the Space Shuttle | 315 |
| Six Mechanisms Used on the SSM/I Radiometer | 323 |
| UHV Technique for Intervacuum Sample Transfer | 339 |
| Versatile UHV Sample Transfer System | 347 |
| Piezodriven Spindle for a Specimen Holder in the Vacuum Chamber of a Scanning Electron Microscope | 351 |
| Precision Table for Ultrahigh Vacuum Made of Aluminum Alloys | 355 |
| Extended Travel Ultrahigh Vacuum Sample Manipulator with two Orthogonal, Independent Rotations | 359 |
| Appendix A | Vacuum Mechatronic Components and Companies | 363 |
| Appendix B | Unit Conversion Factors | 365 |
| Appendix C | First International Vacuum Mechatronics Workshop | 367 |
| Reprint Acknowledgements | 369 |
| Index | 373 |
