A Novel Vacuum Packaging Design Process for Microelectromechanical System (MEMS) Quad- Mass Gyroscopes

A Novel Vacuum Packaging Design Process for Microelectromechanical System (MEMS) Quad- Mass Gyroscopes

by U.S. Army Research Laboratory

Paperback

$38.00
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Product Details

ISBN-13: 9781542768061
Publisher: CreateSpace Publishing
Publication date: 01/26/2017
Pages: 46
Product dimensions: 8.50(w) x 11.02(h) x 0.10(d)

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