Advanced Metallization Conference in 1998 (AMC 1998): Volume 14

Advanced Metallization Conference in 1998 (AMC 1998): Volume 14

Hardcover

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Product Details

ISBN-13: 9781558994843
Publisher: Materials Research Society
Publication date: 03/28/1999
Series: MRS Proceedings Series
Pages: 784
Product dimensions: 6.50(w) x 9.30(h) x 1.80(d)

Table of Contents

Preface
Acknowledgments
Materials Research Society Conference
Proceedings Keynote Presentation Shift to Copper and Low-k at SEMATECH
PART I: COPPER-BASED METALLIZATION TECHNOLOGIES
PART II: CMP
PART III: ADVANCED BARRIER TECHNOLOGIES
PART IV: ADVANCED AI METALLIZATION
PART V: LOW-k DIELECTRICS
PART VI: SILICIDES AND ADVANCED DRAM METALLIZATION
PART VII: INTEGRATION OF ADVANCED METALLIZATION MATERIALS
Author Index
Subject Index2

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