Air Gap Structures for Advanced Metallization Schemes

Air Gap Structures for Advanced Metallization Schemes

by Andreas Stich

Paperback

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Product Details

ISBN-13: 9783639060881
Publisher: VDM Verlag Dr. Mueller e.K.
Publication date: 09/26/2008
Pages: 160
Product dimensions: 6.00(w) x 9.00(h) x 0.34(d)

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