ISBN-10:
0780347145
ISBN-13:
9780780347144
Pub. Date:
04/01/1994
Publisher:
Wiley
Cold Plasma Materials Fabrication: From Fundamentals to Applications / Edition 1

Cold Plasma Materials Fabrication: From Fundamentals to Applications / Edition 1

by Alfred Grill

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Product Details

ISBN-13: 9780780347144
Publisher: Wiley
Publication date: 04/01/1994
Pages: 272
Product dimensions: 5.93(w) x 9.41(h) x 0.74(d)

About the Author

Alfred Grill is the author of Cold Plasma Materials Fabrication: From Fundamentals to Applications, published by Wiley.

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Table of Contents

Preface.

List of Symbols.

Fundamentals of Plasma.

Cold Plasma Generation.

Plasma Chemistry.

Plasma Reactors.

Plasma Diagnostics.

Cold Plasma Processes for Surface Modification.

Deposition of Coatings by PECVD.

Plasma Assisted Etching.

Index.

About the Author.

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