Cold Plasma Materials Fabrication: From Fundamentals to Applications / Edition 1 available in Paperback
- Pub. Date:
Cold plasma research and development activities, as well as its applications in materials processing have grown enormously in the past decade. Cold Plasma in Materials Fabrication is a comprehensive, up-to-date monograph which presents all aspects of cold, low-pressure plasmas.
The eight extensive chapters in this book cover the following topics:
- The main parameters and classifications of different types of plasma
- Reactions within cold plasmas and between cold plasmas and solid surfaces
- State-of-the-art methods for generation and diagnostics of cold plasmas and their application for processing of materials
|Product dimensions:||5.93(w) x 9.41(h) x 0.74(d)|
About the Author
Alfred Grill is the author of Cold Plasma Materials Fabrication: From Fundamentals to Applications, published by Wiley.
Table of Contents
Preface. List of Symbols. Fundamentals of Plasma. Cold Plasma Generation. Plasma Chemistry. Plasma Reactors. Plasma Diagnostics. Cold Plasma Processes for Surface Modification. Deposition of Coatings by PECVD. Plasma Assisted Etching. Index. About the Author.